Enhanced dielectric properties of barium strontium titanate thin films by doping modification

  • Libin GaoEmail author
  • Zhipu Guan
  • Shixian Huang
  • Kexin Liang
  • Hongwei Chen
  • Jihua ZhangEmail author


Barium strontium titanate (BaxSr1–xTiO3, BST) thin films have large dielectric constant, low dielectric loss, especially the high dielectric tunability, which make them prospective candidates for microwave tunable applications. Resent developments in BST thin films by doping modification are reviewed. The A-site doping, B-site doping, and both sites codoping modifications are summarized and analyzed, respectively. The comparison of dielectric properties and microstructure of the BST thin films with different sites doping modifications is critically analyzed. The single A-site or B-site doping modification cannot obtain the BST thin films with balanced enhancement of the dielectric properties. However, the different elements codoping in both A-site and B-site of BST thin films is demonstrated to be an effective method to achieve balanced dielectric property optimization.



The authors grateful acknowledge the support from the Natural Science Foundation of China (Grant No. 51602037) and the Open Foundation of State Key Laboratory of Electronic Thin Films and Integrated Devices (KFJJ201510).


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© Springer Science+Business Media, LLC, part of Springer Nature 2019

Authors and Affiliations

  1. 1.State Key Laboratory of Electronic Thin Films and Integrated DevicesChengduPeople’s Republic of China
  2. 2.Collaboration Innovation Center of Electronic Materials and DevicesChengduPeople’s Republic of China
  3. 3.School of Electronic Science and EngineeringUniversity of Electronic Science and Technology of ChinaChengduPeople’s Republic of China
  4. 4.School of Materials and EnergyChengduPeople’s Republic of China

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