Photoconductive properties of polycrystalline selenium based lateral MISIM photodetectors of high quantum efficiency using different dielectrics as the charge blocking layer

  • Cheng-Yi Chang
  • Yu-Wei Huang
  • Yi-Jie Lin
  • Jye-Yow Liao
  • Jian-Siang Lin
  • Yi-Ming Li
  • Chieh-Yang Chen
  • Jeng-Tzong Sheu
  • Fu-Ming PanEmail author


We studied the photoconductive performance of polycrystalline selenium (pc-Se) based photodetectors with a lateral metal–insulator-semiconductor-insulator–metal (MISIM) device structure. The insulator layer is a 10 nm-thick Ga2O3, HfO2, or Al2O3 thin film, and used as a charge blocking layer (CBL) to suppress dark current injected from the Al electrodes. The dark current suppression primarily depends on the barrier height of the junctions between the CBLs and electrodes. The Ga2O3 CBL exhibits a poor dark current suppression compared to the HfO2 and the Al2O3 CBLs because of a lower electron barrier at the cathode. The lateral pc-Se photodetectors exhibit a very high internal photocurrent gain due to Fowler–Nordheim tunneling at relatively low applied voltages. The better crystallinity of pc-Se grains formed on the Ga2O3 CBL leads to a higher photoconversion efficiency for the MISIM-Ga2O3 photodetector. Compared with amorphous Se based lateral MISIM photodetectors, the pc-Se photodetectors demonstrate a uniform and much better photoconductive performance over the visible spectrum.



This work is supported by the Ministry of Science and Technology (MOST), R.O.C. under the contract number MOST 106-2221-E-009-075-MY2. Technical supports of the National Nano Device Laboratories and Nano Facility Center of National Chiao Tung University are also acknowledged.

Supplementary material

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© Springer Science+Business Media, LLC, part of Springer Nature 2019

Authors and Affiliations

  • Cheng-Yi Chang
    • 1
  • Yu-Wei Huang
    • 1
  • Yi-Jie Lin
    • 1
  • Jye-Yow Liao
    • 1
  • Jian-Siang Lin
    • 1
  • Yi-Ming Li
    • 2
  • Chieh-Yang Chen
    • 2
  • Jeng-Tzong Sheu
    • 3
  • Fu-Ming Pan
    • 1
    Email author
  1. 1.Department of Materials Science and EngineeringNational Chiao-Tung UniversityHsinchuTaiwan, ROC
  2. 2.Department of Electrical EngineeringNational Chiao-Tung UniversityHsinchuTaiwan, ROC
  3. 3.Institute of Biomedical EngineeringNational Chiao-Tung UniversityHsinchuTaiwan, ROC

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