Structural and optical properties of Cu–N codoped ZnO thin films deposited by magnetron cosputtering

  • Haonan Liu
  • Yujing Ran
  • Liuwei Jia
  • Huiping Lu
  • Shujun Zhao
  • Hongkang Zhao
  • Yinglan Li
  • Zhaotan Jiang
  • Zhi Wang


ZnO films codoped by copper and nitrogen were prepared by magnetron cosputtering. The effects of this codoping on the structural and optical properties of ZnO films were systematically studied. The results show that Cu–N codoping didn’t affect the optimal orientation. Cu–N codoping can enlarge the grain size, enhance the crystallinity, reduce the stress and lead to denser and smoother surface. A significant red shift of absorption edge and gap-narrowing effect resulting from codoping were found in ZnO films. Cu-doping, N-doping, and oxygen vacancy are the main factors leading to property modification of the ZnO films. By Cu–N codoping, we can modulate the microstructure and optical properties of ZnO films in a wider range.



The work is funded by National Natural Science Foundation of China (Grant Nos. 51002010 and 11774029).


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Authors and Affiliations

  1. 1.School of PhysicsBeijing Institute of TechnologyBeijingPeople’s Republic of China

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