Abstract
Amorphous TiOx, WO3 and Ag mid-layer films were deposited on polyethersulfone (PES) and soda-lime glass via electron beam evaporation at room temperature. The crystallinity, microstructure and surface morphology of asymmetric TiOx/Ag/WO3 multilayers (TAW) and symmetric WO3/Ag/WO3 (WAW) multilayers were investigated. The polygrains oriented along the (111) planes in the inserted Ag thin films were adopted to supply carriers into both of the dielectric layers and reduce the sheet resistance of the multilayer. The TAW multilayer with a sufficiently large Ag thickness (>15 nm) exhibited low resistance, and highly visible transmittance, low infra-red transmittance, to serve as a transparent conductive electrode and a good heat mirror. The dependence of the Ag and TiOx thickness on the optical and electrical properties of TAW multilayers was also explored. A figure of merit (FOM) was used to find an optimal layer structure for a TAW multilayer with superior conductivity and highly visible transparency. A high FOM of 1.2 × 10−1 (Ω−1) was achieved at the visible wavelength of 550 nm for a asymmetric TAW stacked layer on PES with a 15-nm-thick Ag layer, a 40-nm-thick TiOx and a 40 nm-thick WO3 layer. The moisture resistances of the TAW stacking layer showed more robustness than that of the WAW sample after damp heat exposure.
Similar content being viewed by others
References
J. Meyer, S. Hamwi, M. Kroger, W. Kowalsky, T. Riedl, A. Kahn, Adv. Mater. 24, 5408 (2012)
J.H. Chang, W.H. Lin, P.C. Wang, J.I. Taur, T.A. Ku, W.T. Chen, S.J. Yan, W.I. Wu, Sci. Rep. 5, 9693 (2015)
H. Youn, H.J. Park, L.J. Guo, Small 11, 2228 (2015)
L.A. Wang, J.S. Swensen, E. Polikarpov, D.W. Matson, C.C. Bonham, W. Bennett, D.J. Gaspar, A.B. Padmaperuma, Org. Electron. 11, 1555 (2010)
M.V. Castro, C.J. Tavares, Thin Solid Films 586, 13 (2015)
P. Banerjee, W.J. Lee, K.R. Bae, S.B. Lee, G.W. Rubloff, J. Appl. Phys. 108, 043504 (2010)
M.S. Wang, L.X. Jiang, Y.L. Wang, E.J. Kim, S.H. Hahn, J. Am. Ceram. Soc. 98, 3022 (2015)
G.M. Wan, S.W. Wang, X.W. Zhang, M.L. Huang, Y.W. Zhang, W.B. Duan, L.X. Yi, Appl. Surf. Sci. 357, 622 (2015)
Q.Y. Bao, J.P. Yang, J.X. Tang, Y.Q. Li, C.S. Lee, S.T. Lee, Org. Electron. 11, 1578 (2010)
T. Bak, W.X. Li, J. Nowotny, A.J. Atanacio, J. Davis, J. Phys. Chem. A 119, 9465 (2015)
C. Guillen, J. Herrero, Thin Solid Films 520, 1 (2011)
L. Cattin, J.C. Bernede, M. Morsli, Phys. Status Solidi A Appl. Mater. 210, 1047 (2013)
H. Yang, S. Shin, J. Park, G. Ham, J. Oh, H. Jeon, Curr. Appl. Phys. 14, 1331 (2014)
Y.C. Fang, J.J. He, K. Zhang, C.Y. Xiao, B. Zhang, J. Shen, H.H. Niu, R. Yan, J.L. Chen, Opt. Lett. 40, 5455 (2015)
A. Dhar, T.L. Alford, ECS Solid State Lett. 3, N33 (2014)
C.H. Cheng, J.M. Ting, Thin Solid Films 516, 203 (2007)
M.M.D. Kumar, S.M. Baek, J. Kim, Mater. Lett. 137, 132 (2014)
J.H. Kim, D.S. Kim, S.K. Kim, Y.Z. Yoo, J.H. Lee, S.W. Kim, T.Y. Seong, Ceram. Int. 42, 3473 (2016)
H.K. Park, J.W. Kang, S.I. Na, D.Y. Kim, H.K. Kim, Sol. Energy Mater. Sol. Cells 93, 1994 (2009)
A. Indluru, T.L. Alford, J. Appl. Phys. 105, 123528 (2009)
H.L. Li, Y. Lv, X. Zhang, X.Y. Wang, X.Y. Liu, Sol. Energy Mater. Sol. Cells 136, 86 (2015)
N. Zhang, Y.S. Hu, X.Y. Liu, Appl. Phys. Lett. 103, 033301 (2013)
C.C. Wu, P.S. Chen, C.H. Peng, C.C. Wang, J. Mater. Sci.: Mater. Electron. 24, 2461 (2013)
K. Jeon, H. Youn, S. Kim, S. Shin, M. Yang, Nanoscale Res. Lett. 7, 253 (2012)
M.M. Hasan, A.S.M.A. Haseeb, H.H. Majuki, Surf. Eng. 27, 382 (2011)
C. T. Lee, D. Y. Chiang, P. K. Chiu, N. N. Chu, in Proceedings of 2014 International Symposium on Next-Generation Electronics. doi:10.1109/ISNE.2014.6839355
B.D. Cullity, S.R. Stock, Elements of X-ray Diffraction, Ch. 3 (Prentice-Hall, Englewood Cliffs, 2001)
D.R. Lide, CRC Handbook of Chemistry and Physics, 76th edn. (CRC, Boca Raton, 1995)
S.H. Mohamed, J. Phys. Chem. Solids 69, 2378 (2008)
J.T. Guske, J. Brown, A. Welsh, S. Franzen, Opt. Express 20, 23215 (2012)
X. Fang, C.L. Mak, J.Y. Dai, K. Li, H. Ye, C.W. Leung, A.C.S. Appl, Mater. Interfaces 6, 15743 (2014)
J.A. Jeong, H.K. Kim, Sol. Energy Mater. Sol. Cells 93, 1801 (2009)
G. Haacke, J. Appl. Phys. 47, 4086 (1976)
J.H. Kim, H.K. Lee, J.Y. Na, S.K. Kim, Y.Z. Yoo, T.Y. Seong, Ceram. Int. 41, 8059 (2015)
W.J. Yu, L. Shen, F.X. Meng, Y.B. Long, S.P. Ruan, W.Y. Chen, Sol. Energy Mater. Sol. Cells 100, 226 (2012)
K. Hong, K. Kim, S. Kim, I. Lee, H. Cho, S. Yoo, H.W. Choi, N.Y. Lee, Y.H. Tak, J.L. Lee, J. Phys. Chem. C 115, 3453 (2011)
H. Kermani, H.R. Fallah, H. Hajimahmoodzadeh, Phys. E 47, 303 (2013)
Y.C. Han, M.S. Lin, J.H. Park, K.C. Choi, Org. Electron. 14, 3437 (2013)
N. Formica, P. Mantilla-Perez, D.S. Ghosh, D. Janner, T.L. Chen, M. Huang, S. Garner, J. Martorell, V. Pruneri, ACS Appl. Mater. Interfaces 7, 4541 (2015)
M.G. Varnamkhasti, H.R. Fallah, M. Mostajaboddavati, A. Hassanzadeh, Vacuum 86, 1318 (2012)
Acknowledgments
One of authors (P. S. Chen) acknowledges that this work is supported by the Minister of Science and Technology through Grant No. MOST 104-2221-E-159-008.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Peng, CH., Chen, P.S., Lo, J.W. et al. Indium-free transparent TiOx/Ag/WO3 stacked composite electrode with improved moisture resistance. J Mater Sci: Mater Electron 27, 12060–12066 (2016). https://doi.org/10.1007/s10854-016-5354-z
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10854-016-5354-z