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Fabrication and characterization of fast response pyroelectric sensors based on Fe-doped PZT thin films

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Abstract

Pyroelectric IR-detectors based on Pb(1−y)Fey(Zrx,Ti(1−x))O3 thin film have been successfully fabricated via ex situ oxidization annealing of DC magnetron sputtered conductive Fe doped lead-zirconium-titanium thin film on Au/SiO2/Si substrates. Structural as well as electro-optical properties were characterized. The results indicate that Fe-doping has had a remarkable structural effect namely, grain-size reduction, enhanced device voltage responsivity, 67.23 mV/mJ, and current-sensitivity, 5.16 × 10−6 mA/mJ. Moreover the pyroelectric coefficient, 609 μC m−2 °C−1, and merit figure, 1.43 × 10−6 μC m J−1, were significantly enhanced in comparison to previous reports on composite thick and thin film PZT and non-PZT based device structures.

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Acknowledgments

This work was carried out as Sheykh Bahaee’s Research projects. The authors would like to thank M. Tavvakoli for his useful advice with the electronics setup measurements.

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Authors and Affiliations

  1. Sheykh Bahaee Research Laboratory, Science and Research Branch, Tehran, Islamic Azad University, Tehran, Iran

    Farhad Fouladi, Ehsan Javid & Yousef Seyed Jalili

  2. Physics Research Center, Sciences and Research Branch, Islamic Azad University, Tehran, Iran

    Yousef Seyed Jalili

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  1. Farhad Fouladi
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Correspondence to Farhad Fouladi.

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Fouladi, F., Javid, E. & Jalili, Y.S. Fabrication and characterization of fast response pyroelectric sensors based on Fe-doped PZT thin films. J Mater Sci: Mater Electron 27, 6578–6585 (2016). https://doi.org/10.1007/s10854-016-4603-5

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