Comprehensive study of graphene grown by chemical vapor deposition
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Graphene was grown on Cu foil by chemical vapor deposition with CH4 as carbon source, and then was transferred onto various substrates for device applications. The structural and optical properties of graphene were investigated, comprehensively. Raman spectra indicate as-grown and transferred graphene films are homogenous monolayer graphene. Optical microscopy and scanning electron microscopy images reveal wrinkle-free and smooth surface of transferred graphene, confirming the high quality of graphene. In addition, the transferred graphene on glass exhibits excellent transmittances in the visible region (89.3 % at ~500 nm). Therefore, the results present the controllable approaches to achieve as-grown and transferred high quality graphene for the fabrication of multiple nanoelectronic devices.
KeywordsRaman Spectrum Chemical Vapor Deposition Graphitic Carbon Monolayer Graphene Chemical Vapor Deposition Method
The work is supported by the Talent Plan at Anhui University of Technology. The authors acknowledge Peng Li from Hefei University of Technology for his help in graphene transfer.
- 30.J. Hodkiewicz, Characterizing carbon materials with Raman spectroscopy, Thermo scientific, Application note 51901. http://fscimage.thermoscientific.com/images/D19504~.pdf