Skip to main content
SpringerLink
Log in

Electrical and structural properties of LiNbO3 films, grown by RF magnetron sputtering

  • Published:
Journal of Materials Science: Materials in Electronics Aims and scope Submit manuscript

Abstract

Nanocrystalline films of LiNbO3 on substrates (001)Si and (001)Si–SiO2 were synthesized by the method of RF magnetron sputtering. The elemental composition, structure of the LiNbO3 films, and also—electrical properties of heterostructures (001)Si–LiNbO3 and (001)Si–SiO2–LiNbO3 were studied. The dielectric constant of the LiNbO3 films calculated from the capacitance at the accumulation region was about 28. The resistivity was 1·109 ohm cm for films on (100)Si and 1.6·1011 ohm cm for films on (001)Si–SiO2. It has been determined that transmission of the current in the studied structures during direct biases is defined by hopping conduction, and, during reverse biases—by the Poole–Frenkel effect.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9

Similar content being viewed by others

References

  1. S. Kondo, S. Miyazawa, S. Fusimi, K. Sugii, Appl. Phys. Lett. 26, 489 (1975)

    Article  CAS  Google Scholar 

  2. B.J. Curtis, H.R. Brunner, Mater. Res. Bull. 10, 515 (1975)

    Article  CAS  Google Scholar 

  3. S.B. Ogale, R.N. Dikshit, S.M. Kanetkar, J. Appl. Phys. 71, 5718 (1992)

    Article  CAS  Google Scholar 

  4. K. Nashimoto, M.J. Cima, P.C. McIntyre, W.E. Rhine, J. Mater. Res. 10, 2564 (1995)

    Article  CAS  Google Scholar 

  5. A.Z. Simões, M.A. Zaghete, B.D. Stojanovic, C.S. Riccardi, A. Ries, A.H. Gonzalez, J.A. Varela, Mater. Lett. 57, 2333 (2003)

    Article  Google Scholar 

  6. S.-K. Park, M.-S. Baek, S.-C. Bae, S.-Y. Kwon, J.-H. Kim, K.-W. Kim, Jpn. J. Appl. Phys. 38, 6483 (1999)

    Article  CAS  Google Scholar 

  7. S.-W. Choi, Y.-S. Choi, D.-G. Lim, S.-I. Moon, S.-H. Kim, B.-S. Jang, Y. Junsin, Korean J. Ceram. 6, 138 (2000)

    CAS  Google Scholar 

  8. T.-H. Lee, F.-T. Hwang, C.-T. Lee, H.-Y. Lee, Mater. Sci. Eng. 136, 92 (2007)

    Article  CAS  Google Scholar 

  9. P.J. Hansen, Y. Terao, Y. Wu, A. Robert, J.S. Speck, J. Vac. Sci. Technol. 23, 162 (2005)

    Article  CAS  Google Scholar 

  10. S.M. Sze, Physics of Semiconductor Devices (Wiley, New York, 1969), p. 812

    Google Scholar 

  11. K. Nassau, H.J. Levinstein, G.M. Laicono, J. Phys. Chem. Solids. 27, 989 (1966)

    Article  CAS  Google Scholar 

  12. N.F. Mott, Conduction in Non-Crystalline Materials, 2nd edn. (Clarendon Press, Oxford, 1993)

    Google Scholar 

  13. R.M. Hill, Philos. Mag. 23, 59 (1971)

    Article  CAS  Google Scholar 

  14. W.F. Brown, Dielectrics (Springer, Berlin, 1956)

    Google Scholar 

Download references

Acknowledgments

The present work was conducted with the assistance of Russian Foundation for Basic Research (RFBR) (grant №09-03-00189a).

Author information

Authors and Affiliations

  1. Voronezh State University, Universitetskaya Square, 1, 394000, Voronezh, Russia

    V. Iyevlev, A. Kostyuchenko & V. Vakhtel

  2. Voronezh State Architectural University, 20-th October’s Anniversary str., 84, 394006, Voronezh, Russia

    M. Sumets

Authors
  1. V. Iyevlev
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. Kostyuchenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. Sumets
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. V. Vakhtel
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to M. Sumets.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Iyevlev, V., Kostyuchenko, A., Sumets, M. et al. Electrical and structural properties of LiNbO3 films, grown by RF magnetron sputtering. J Mater Sci: Mater Electron 22, 1258–1263 (2011). https://doi.org/10.1007/s10854-011-0296-y

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10854-011-0296-y

Keywords

Search

Navigation