Fabrication of thin films by sputtering deposition using (Ba0.3Sr0.7)(Zn1/3Nb2/3)O3 ceramic as target



Dielectric ceramic thin films were fabricated on SiO2 (110) substrates by the radio frequency (RF) magnetron sputtering method using (Ba0.3Sr0.7)(Zn1/3Nb2/3)O3 microwave dielectric ceramic as target. The microstructure, components, and morphology of the thin films were investigated thoroughly. The results reveal that the experimental conditions can affect the growth of the thin films significantly. The main phases of the thin films are Ba0.5Sr0.5Nb2O6 and Ba0.27Sr0.75Nb2O5.78, which are of different composition from that of the ceramic target due to Zn loss. The thin films are polycrystalline with high-quality crystalline and are made up of dense rod-like structures. The growth mechanism of the thin films is discussed in particular.


Nb2O5 Crystalline Quality Radio Frequency Magnetron Transportation Capacity Ceramic Thin Film 
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The author thank Mr. Chuanwen Cui, Prof. Shuyun Wang, and Prof.Yuguo Li for their contributions to this article.


  1. 1.
    P. Ravichandran, U. Selvaraj, A.S. Bhalla, R. Roy, Mater. Lett. 34, 430–434 (1998)CrossRefGoogle Scholar
  2. 2.
    C.H. Lu, C.C. Tsai, Mater. Lett. 31, 271–274 (1997)CrossRefGoogle Scholar
  3. 3.
    D. Ravichandran, B. Jin, R. Roy, A.S. Bhalla, Mater. Lett. 25, 257–259 (1995)CrossRefGoogle Scholar
  4. 4.
    D. Ravichandran, J.R. Meyer, R. Roy, R. Guo, S. Bhallaa, L.E. Cross, Mater. Res. Bull. 31, 817–825 (1996)CrossRefGoogle Scholar
  5. 5.
    S. Katayama, I. Yoshinaga, N. Yamada, T. Nagai, J. Am. Ceram. Soc. 79, 2059–2064 (1996)CrossRefGoogle Scholar
  6. 6.
    M.R. Varma, S. Biju, M.T. Sebastian, J. Euro. Ceram. Soc. 26, 1903–1907 (2006)CrossRefGoogle Scholar
  7. 7.
    L.N. Gao, J.W. Zhai, X. Yao, Ceram. Inter. 34, 1023–1026 (2008)CrossRefGoogle Scholar
  8. 8.
    S.J. Lee, B.Y. Jang, Y.H. Jung, S. Nahm, H.J. Lee, Y.S. Kim, J. Euro. Ceram.Soc. 26, 2165–2168 (2006)CrossRefGoogle Scholar
  9. 9.
    E.A. Kotomin, I. Eglitis, R.J. Maier, E. Heifets, Thin Solid Films 400, 76–80 (2001)CrossRefGoogle Scholar
  10. 10.
    Z.Z. Tang, S.J. Liu, R.K. Singh, S. Bandyopadhyay, I. Susa, T. Kotani, M. van Schilfgaarde, N. Newman, Acta. Mater. 57, 432–440 (2008)CrossRefGoogle Scholar
  11. 11.
    B.D. Lee, H.R. Lee, K.H. Yoon, Y.S. Cho, Ceram. Int. 31, 143–147 (2005)CrossRefGoogle Scholar
  12. 12.
    Z.Y. Feng, W. Chen, O.K. Tan, Mater. Res. Bul. 44, 1709–1714 (2009)CrossRefGoogle Scholar
  13. 13.
    H.H. Huang, M.C. Wang, C.Y. Chen, N.C. Wu, H.J. Lin, Mater. Sci. Eng. A 433, 279–285 (2006)CrossRefGoogle Scholar
  14. 14.
    H.H. Huang, M.C. Wang, C.Y. Chen, N.C. Wu, H.J. Lin, J. Euro. Ceram. Soc. 26, 3211–3219 (2006)CrossRefGoogle Scholar
  15. 15.
    A. Ianculescu, B. Despax, V. Bley, T. Lebey, Ra. Gavrilă, N. Drăgan, J. Euro. Ceram. Soc. 27, 1129–1135 (2007)CrossRefGoogle Scholar
  16. 16.
    F. Shi, Dielectric properties of Ba(Zn1/3Nb2/3)O3 microwave dielectric ceramics. Tianjin University Ph.D. Dissertation, Tianjin, 2003Google Scholar
  17. 17.
    C.W. Cui, F. Shi, Y.G. Li, S.Y. Wang, J. Mater. Sci. Mater. Electr. 21, 349–354 (2010)CrossRefGoogle Scholar
  18. 18.
    F. Shi, C.W. Cui, Appl. Surf. Sci. 256, 2626–2629 (2010)CrossRefGoogle Scholar
  19. 19.
    F.M. Amanullah, K.I. Pratap, V.B. Hari, Mater. Sci. Eng. B 52, 93–98 (1998)CrossRefGoogle Scholar
  20. 20.
    B. Wang, M. Wang, D.X. Zhang, A.P. Huang, X.M. Song, Y.J. Zou, H. Yan, Func. Mater. 33, 82–83 (2002)Google Scholar
  21. 21.
    L.Y. Liu, M.K. Zhu, Y.D. Hou, M.M. Shao, H. Yan, J. Wuhan. Univ. Techonal. 27, 1–3 (2005)Google Scholar
  22. 22.
    W.Z. Tang, Theory, Technology and Application for the Fabrication of Thin Film materials (Metallurgy Industry Press, Beijing, 2003)Google Scholar

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© Springer Science+Business Media, LLC 2010

Authors and Affiliations

  1. 1.College of Physics & ElectronicsShandong Normal UniversityJinanPeople’s Republic of China

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