Hap-based porous material with potential application as bio-packages for MEMS
Novel hydroxyapatite-based hybrid materials with controlled porosity and good adhesion to silicon surfaces were designed as bio-package for MEMS with potential application for implants in the human body. These materials were prepared using synthetic Hydroxyapatite (HAp) powder with three different polymeric agglutinants. These porous materials have high ceramic content (up to 60 wt.% respect to resin) with a pore size between 100 and 350 microns and a pore volume fraction in the 25–60% range. These hybrid materials have high wearing resistance and hydrolytic stability. The samples were characterized mechanical and morphologically using XRD, SEM, densitometry, abrasion and mechanical tests.
KeywordsWear Resistance Porous Material Alumina Particle Young Modulus Abrasion Resistance
The authors are in debt to Alicia del Real by her valuable help in SEM analysis and Maribel Presa for the determination of the mechanical properties.
- 2.S. Xiao, L. Che, X. Li, Y. Wang, A cost-effective flexible MEMS technique for temperature sensing. Microelectron. J. 38, 360–364 (2007)Google Scholar
- 5.Y.I. Rozenberg, Y. Rosenberg, V. krylov, G. Belitsky, Y. Shacham-Diamand, Resin-bonded permanent magnetic films with uot-of-plane magnetization for MEMS applications. J. Magn. Magn. Mater. 305, 357–360 (2006)Google Scholar
- 14.A. Cosijns, C. Vervaet, J. Luyten, S. Mullens, F. Siepmann, L. Van Hoorebeke, B. Masschaele, V. Cnudde, J.P. Remon, Porous hydroxyapatite tablets as carriers for low-dosed drugs. Eur. J. Pharm. Biopharm. (In Press), Corrected Proof, Available online 28 February 2007Google Scholar
- 26.See for example: S. Susuki, E. Ando, Abrasion of thin films deposited onto glass by the Taber test. Thin Solid Films 340, 194–200 (1999)Google Scholar