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The effects of the PbO content and seeding layers upon the microstructure and orientation of sol-gel derived PZT films

  • Chen Zhu
  • Yang Chentao
  • Wang Sheng
  • Yang Bangchao
Article

Abstract

This paper systematically studied the factors including Pb content of precursor, PT seeding layer and TiO2 and ZrO2 seeding layers, which influence greatly the crystal orientation of lead zirconate titanate (PZT, Zr/Ti = 52/48) thin films fabricated by a sol-gel process. We find that the PZT films deposited by precursor with 20% mole excess Pb displayed strong (111) preferred orientation, with 5% mole excess Pb showed a little (100) orientation and pyrochlore phase. PT seeding layer was found prompting the PZT films phase transformation with (110) preferred orientation. In addition, the results show that the TiO2 and ZrO2 seeding layers had totally different effects on the preferred orientation of PZT films. The films with TiO2 seeding layer were highly (111) oriented and exhibited better ferroeletric properties (remnant polarization Pr = 14.2 μC⋅ cm−2, coercive field Ec = 59.1 Kvcm−1) than those of the films with ZrO2 seeding layer shown (100) orientation (Pr = 7.4 μC⋅cm−2, Ec = 42.9 Kvcm−1).

Keywords

TiO2 Zirconate Titanate Phase Transformation Prefer Orientation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science + Business Media, Inc. 2006

Authors and Affiliations

  • Chen Zhu
    • 1
  • Yang Chentao
    • 1
  • Wang Sheng
    • 1
  • Yang Bangchao
    • 1
  1. 1.College of Microelectronics and Solid State ElectronicsUniversity of Electronic Science and Technology of ChinaChengduPeople's Republic of China

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