Journal of Materials Science

, Volume 50, Issue 24, pp 8104–8110 | Cite as

Room-temperature yield and fracture strength of single-crystalline 6H silicon carbide

  • Gihyun Kwon
  • Hyo-Haeng Jo
  • Sangyeob Lim
  • Chansun Shin
  • Hyung-Ha Jin
  • Junhyun Kwon
  • Gwang-Min Sun
Original Paper


Silicon carbide (SiC) has excellent physical and electrical properties with potential for nuclear applications and power semiconductors. The properties of SiC, however, have not been fully determined. One property in question is the critical resolved shear stress (CRSS) for slip at room temperature. Here we evaluated the CRSS of 6H-SiC using micro-compression tests. Single-crystalline micro-pillars were fabricated on the surface of a 6H-SiC(0001) wafer. Brittle fracture occurred in all the fabricated micro-pillars. The compressive fracture strength of the material was determined to be near 24 GPa. Micro-pillars were also fabricated on a tilted specimen, to facilitate slip on the basal plane of hexagonal close-packed structure. Plastic deformation was observed in micro-pillars below 0.49 μm in diameter. Cross-sectional TEM observation of the compressed micro-pillars showed clear slip traces and dislocations on the basal {0001} planes. The CRSS of 6H-SiC was determined to be 9.8 ± 0.69 GPa from the measured stress–strain curves and the sample geometry. The CRSS evaluated here was compared with that determined from first-principle calculations reported in the literature.


MgAl2O4 Critical Resolve Shear Stress Peierls Stress Measure Yield Strength Pillar Size 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



This work was supported by the National Research Foundation of Korea (NRF) Grant funded by the Korea government (MSIP) (NRF-2014M2A8A1048615).


  1. 1.
    Jepps NW, Page TF (1983) Polytypic transformations in silicon carbide. Prog Cryst Growth Charact 7:259–307CrossRefGoogle Scholar
  2. 2.
    Snead LL, Nozawa T, Katoh Y, Byun T-S, Kondo S, Petti DA (2007) Handbook of SiC properties for fuel performance modeling. J Nucl Mater 371:329–377CrossRefGoogle Scholar
  3. 3.
    Jung Y-I, Kim S-H, Kim H-G, Park J-Y, Kim W-J (2013) Microstructures of diffusion bonded SiC ceramics using Ti and Mo interlayers. J Nucl Mater 441:510–513CrossRefGoogle Scholar
  4. 4.
    Bhatnagar M, Baliga BJ (1993) Comparison of 6H-SiC, 3C-SiC, and Si for power devices. IEEE Trans Electron Devices 40:645–655CrossRefGoogle Scholar
  5. 5.
    Shenai K, Scott RS, Baliga BJ (1989) Optimum semiconductors for high-power electronics. IEEE Trans Electron Devices 43:1811–1823CrossRefGoogle Scholar
  6. 6.
    Tolbert LM, Ozpineci B, Islam SK, Peng FZ (2002) Impact of SiC power electronic devices for hybrid electric vehicles, SAE Technical PaperGoogle Scholar
  7. 7.
    Blumenau AT, Fall CJ, Jones R, Öberg S, Frauenheim T, Briddon PR (2003) Structure and motion of basal dislocations in silicon carbide. Phys Rev B 68:174108CrossRefGoogle Scholar
  8. 8.
    Ohno Y, Yonenaga I, Miyao K, Maeda K, Tsuchida H (2012) In-situ transmission electron microscopy of partial-dislocation glide in 4H-SiC under electron radiation. Appl Phys Lett 101:042102CrossRefGoogle Scholar
  9. 9.
    Chen H-P, Kalia RK, Nakano A, Vashishta P, Szlufarska I (2007) Multimillion-atom nanoindentation simulation of crystalline silicon carbide: orientation dependence and anisotropic pileup. J Appl Phys 102:063514CrossRefGoogle Scholar
  10. 10.
    Zhang HL (2011) The properties of Shockley partials in Crystalline cubic silicon carbide (3C-SiC): core width and Peierls stress. Phys B 406:1323–1325CrossRefGoogle Scholar
  11. 11.
    Pizzagalli L (2014) Stability and mobility of screw dislocations in 4H, 2H and 3C silicon carbide. Acta Mater 78:236–244CrossRefGoogle Scholar
  12. 12.
    Kiani S, Leung KWK, Radmilovic V, Minor AM, Yang J-M, Warner DH, Kodambaka S (2014) Dislocation glide-controlled room-temperature plasticity in 6H-SiC single crystals. Acta Mater 80:400–406CrossRefGoogle Scholar
  13. 13.
    Shin C, Jin HH, Kim WJ, Park JY (2012) Mechanical properties and deformation of cubic silicon carbide micropillars in compression at room temperature. J Am Ceram Soc 95:2944–2950CrossRefGoogle Scholar
  14. 14.
    Moser B, Wasmer K, Barbieri L, Michler J (2007) Strength and fracture of Si micropillars: a new scanning electron microscopy-based micro-compression test. J Mater Res 22:1004–1011CrossRefGoogle Scholar
  15. 15.
    Michler J, Wasmer K, Meier S, Östlund F (2007) Plastic deformation of gallium arsenide micropillars under uniaxial compression at room temperature. Appl Phys Lett 90:043123CrossRefGoogle Scholar
  16. 16.
    Korte S, Clegg WJ (2010) Discussion of the dependence of the effect of size on the yield stress in hard materials studied by micro-compression of MgO. Philos Mag 91:1150–1162CrossRefGoogle Scholar
  17. 17.
    Shin C, Lim S, Jin HH, Hosemann P, Kwon J (2014) Development and testing of microcompression for post irradiation characterization of ODS steels. J Nucl Mater 444:43–48CrossRefGoogle Scholar
  18. 18.
    Wijesundara M, Azevedo R (2011) Silicon carbide microsystems for harsh environments. Springer, New YorkCrossRefGoogle Scholar
  19. 19.
    Zhang H, Schuster BE, Wei Q, Ramesh KT (2006) The design of accurate micro-compression experiments. Scr Mater 54:181–186CrossRefGoogle Scholar
  20. 20.
    Gabriel G, Erill I, Caro J, Gómez R, Riera D, Villa R, Godignon P (2007) Manufacturing and full characterization of silicon carbide-based multi-sensor micro-probes for biomedical applications. Microelectron J 38:406–415CrossRefGoogle Scholar
  21. 21.
    Östlund F, Rzepiejewska-Malyska K, Leifer K, Hale LM, Tang Y, Ballarini R, Gerberich WW, Michler J (2009) Brittle-to-ductile transition in uniaxial compression of silicon pillars at room temperature. Adv Funct Mater 19:2439–2444CrossRefGoogle Scholar
  22. 22.
    Östlund F, Howie PR, Ghisleni R, Korte S, Leifer K, Clegg WJ, Michler J (2011) Ductile-brittle transition in micropillar compression of GaAs at room temperature. Philos Mag 91:1190–1199CrossRefGoogle Scholar
  23. 23.
    Korte S, Clegg WJ (2009) Micropillar compression of ceramics at elevated temperature. Scr Mater 60:807–810CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media New York 2015

Authors and Affiliations

  • Gihyun Kwon
    • 1
  • Hyo-Haeng Jo
    • 1
  • Sangyeob Lim
    • 2
  • Chansun Shin
    • 1
  • Hyung-Ha Jin
    • 2
  • Junhyun Kwon
    • 2
  • Gwang-Min Sun
    • 3
  1. 1.Department of Materials Science and EngineeringMyongji UniversityYonginRepublic of Korea
  2. 2.Nuclear Materials Safety Research DivisionKorea Atomic Energy Research InstituteDaejeonRepublic of Korea
  3. 3.Neutron Application Technology DivisionKorea Atomic Energy Research InstituteDaejeonRepublic of Korea

Personalised recommendations