Abstract
B4C boron carbide thin films deposited by radio frequency magnetron sputtering in the temperature ranging from room temperature to 650 °C are amorphous. In this article, pair distribution function (PDF) and Fourier transform infrared (FTIR) spectroscopy were used to characterize the short range order (SRO) structure of amorphous B4C thin films. FTIR spectra indicated that icosahedrons exist in the amorphous B4C thin films. The existence of icosahedrons was further verified by the PDFs of amorphous B4C thin films, which were derived from digital selected area electron diffraction patterns. Furthermore, by comparing the PDFs of amorphous B4C thin films with those of three crystalline boron modifications and three structural models of boron carbides (B4C or B10C2), the SRO structure of amorphous B4C thin film was revealed to be similar to that of β-rhombohedral boron, but with the peak shifted to shorter distance.
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Chen MW, McCauley JW, Hemker KJ (2003) Science 299(5612):1563
Wu ML, Kiely JD, Klemmer T, Hsia YT, Howard K (2004) Thin Solid Films 449(1–2):120
Jacobsohn LG, Nastasi M (2005) Surf Coat Tech 200(5–6):1472
Golikova OA (1979) Phys Status Solidi A 51(1):11
Schmechel R, Werheit H (1999) J Phys Condens Matter 11(35):6803
Carrard M, Emin D, Zuppiroli L (1995) Phys Rev B 51(17):11270
Emin D (2006) J Solid State Chem 179(9):2791
Caruso AN, Billa RB, Balaz S, Brand JI, Dowben PA (2004) J Phys Condens Matter 16(10):L139
Hong NN, Mullins J, Foreman K, Adenwalla S (2010) J Phys D 43(27):275101
Osberg K, Schemm N, Balkir S, Brand JO, Hallbeck MS, Dowben PA, Hoffman MW (2006) IEEE Sens J 6(6):1531
Day E, Diaz MJ, Adenwalla S (2006) J Phys D 39(14):2920
Caruso AN, Dowben PA, Balkir S, Schemm N, Osberg K, Fairchild RW, Flores OB, Balaz S, Harken AD, Robertson BW, Brand JI (2006) Mater Sci Eng B 135(2):129
Sezer AO, Brand JI (2001) Mater Sci Eng B 79(3):191
Jansson U, Carlsson JO, Stridh B, Soderberg S, Olsson M (1989) Thin Solid Films 172(1):81
Olsson M, Soderberg S, Stridh B, Jansson U, Carlsson JO (1989) Thin Solid Films 172(1):95
Kulikovsky V, Vorlicek V, Bohac R, Ctvrtlik R, Stranyanek M, Dejneka A, Jastrabik L (2009) Diam Relat Mater 18(1):27
Bao R, Chrisey DB (2010) Thin Solid Films 519(1):164
Csako T, Budai J, Szorenyi T (2006) Appl Surf Sci 252(13):4707
Kokai F, Taniwaki M, Takahashi K, Goto A, Ishihara M, Yamamoto K, Koga Y (2001) Diam Relat Mater 10(3–7):1412
Kokai F, Taniwaki M, Ishihara M, Koga Y (2002) Appl Phys A 74(4):533
Ronning C, Schwen D, Eyhusen S, Vetter U, Hofsass H (2002) Surf Coat Tech 158:382
Suri AK, Subramanian C, Sonber JK, Murthy TSRC (2010) Int Mater Rev 55(1):4
Cockayne DJH (2007) Annu Rev Mater Res 37:159
Cockayne DJH, Mckenzie DR (1988) Acta Crystallogr A 44:870
Doyle PA, Turner PS (1968) Acta Crystallogr A 24(3):390
Decker BF, Kasper JS (1959) Acta Crystallogr 12(7):503
Callmer B (1977) Acta Crystallogr B 33:1951
Hoard JL, Hughes RE, Sands DE (1958) J Am Chem Soc 80(17):4507
Aselage TL, Tissot RG (1992) J Am Ceram Soc 75(8):2207
Lazzari R, Vast N, Besson JM, Baroni S, Dal Corso A (1999) Phys Rev Lett 83(16):3230
Pfrommer BG, Cote M, Louie SG, Cohen ML (1997) J Comput Phys 131(1):233
Perdew JP, Burke K, Ernzerhof M (1996) Phys Rev Lett 77(18):3865
Kobayashi M (1988) J Mater Sci 23(12):4392. doi:10.1007/BF00551937
Katada K (1966) Jpn J Appl Phys 5(7):582
Palatnik LS, Kozma AA, Nechitailo AA (1983) Kristallografiya 28(1):136
Galasso F, Kuehl D, Tice W (1967) J Appl Phys 38(1):414
Galasso F, Vaslet R, Pinto J (1966) Appl Phys Lett 8(12):331
Werheit H, Leithe-Jasper A, Tanaka T, Rotter HW, Schwetz KA (2004) J Solid State Chem 177(2):575
Shirai K, Emura S (1997) J Solid State Chem 133(1):93
Shirai K, Emura S (1996) J Phys Condens Matter 8(50):10919
Franz R, Werheit H (1989) Europhys Lett 9(2):145
Morosin B, Kwei GH, Lawson AC, Aselage TL, Emin D (1995) J Alloy Compd 226(1–2):121
Werheit H (2006) J Phys Condens Matter 18(47):10655
Bao RQ, Yan ZJ, Chrisey DB (Unpublished data)
Badzian AR (1967) Mater Res Bull 2(11):987
Acknowledgement
The authors would express their thanks to Prof. Pawel Keblinski at Rensselaer Polytechnic Institute for useful discussion and suggestions about the calculation of the reduced radial distribution function and pair distribution function. This study was supported by the DARPA Micro-Isotope Power Sources Program and Rensselaer Polytechnic Institute start-up funds.
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Bao, R., Chrisey, D.B. Short range order structure of amorphous B4C boron carbide thin films. J Mater Sci 46, 3952–3959 (2011). https://doi.org/10.1007/s10853-011-5320-3
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DOI: https://doi.org/10.1007/s10853-011-5320-3