Journal of Materials Science

, Volume 45, Issue 20, pp 5547–5552 | Cite as

Stability of the nitrogen-deficient Ti2AlN x MAX phase in Ar2+-irradiated (Ti,Al)N/Ti2AlN x multilayers

  • M. Bugnet
  • T. Cabioc’h
  • V. Mauchamp
  • Ph. Guérin
  • M. Marteau
  • M. Jaouen


The effects of 100 keV Ar2+ ion irradiation on the structure and stability of multilayered dc sputtered and annealed thin films of (Ti,Al)N/Ti2AlN x have been investigated with X-ray diffraction and transmission electron microscopy. It is shown that the multilayer structure is preserved as well as the crystalline structures of both components. This demonstrates a high tolerance of the Ti2AlN x MAX phase in multilayers to damage induced by nuclear elastic interactions. It is suggested that damage recovery may originate from native nitrogen vacancies and from the interfaces that act as sinks for point defects, like Frenkel pairs, created during the irradiation.


High Resolution Transmission Electron Microscopy Multilayer Structure Frenkel Pair Nitrogen Atomic Ratio Nuclear Elastic Collision 
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Copyright information

© Springer Science+Business Media, LLC 2010

Authors and Affiliations

  • M. Bugnet
    • 1
  • T. Cabioc’h
    • 1
  • V. Mauchamp
    • 1
  • Ph. Guérin
    • 1
  • M. Marteau
    • 1
  • M. Jaouen
    • 1
  1. 1.Département Physique et Mécanique des MatériauxInstitut Pprime, UPR 3346 CNRS, Université de Poitiers, ENSMAFuturoscope Chasseneuil CedexFrance

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