Journal of Materials Science

, Volume 44, Issue 12, pp 3315–3318 | Cite as

Thickness-induced crystallization of amorphous In2O3 films: influence of the film deposition rate



Film Thickness Deposition Rate In2O3 Amorphous Region Dark Field Image 
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Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  1. 1.Graduate School of Human and Environmental StudiesKyoto UniversitySakyo-ku, KyotoJapan

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