Phase sensitivity of Raman spectroscopy analysis of CVD titania thin films
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Photocatalytic titania thin films deposited on float glass by chemical vapor deposition were analyzed by transmission electron microscopy, atomic force microscopy, Raman spectroscopy, and X-ray diffraction. Raman spectroscopy results indicate its phase sensitivity in the presence of trace amount of anatase. This suggests a preferable method of using Raman spectroscopy to characterize mixed phases of titania thin films, especially when titania coatings are deposited on other crystalline oxide materials, for example, tin oxide.
KeywordsTitania Rutile Raman Spectroscopy Raman Band Anatase Phase
The authors would like to thank Prof. Andre Sommer of Miami University for Raman spectroscopy measurement.