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Electrochemical deposition of Ni and Cu onto monocrystalline n-Si(100) wafers and into nanopores in Si/SiO2 template

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Abstract

Nickel and copper were potentiostatically deposited onto monocrystalline n-Si (100) wafers and in nanoporous SiO2/Si template from 0.5 M NiSO4 + 0.5 M H3BO3 and 0.005 M CuSO4 + 0.5 M H3BO3 solutions. Nanoporous SiO2/Si template was formed by etching in dilute HF solution of ion tracks. The latter were produced by high-energy (380 MeV) Au+ ions bombardment of silicon oxide thermally grown on silicon (100) substrate. The deposition of metals was studied using cyclic voltammetry (CV), chronoamperometry; the structure and morphology of products were ex-situ investigated by SEM and XRD. The level of pores filling was controlled by deposition time. Electrodeposition occurred selectively into nanopores and the deposition on SiO2 layer was excluded. It was found out that Ni and Cu electrodeposited into nanopores of SiO2/Si system formed the same structures as at electrodeposition on the surface of monocrystalline n-Si—granules for Ni and scale-shaped particles for Cu deposits.

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References

  1. Fink D (2004) Fundamentals of ion-irradiated polymers. Springer Series in Materials Science, vol 63

  2. Fink D, Alegaonkar PS, Petrov AV, Berdinsky AS, Rao V, Müller M, Dwivedi KK, Chadderton LT (2003) Radiat Measur 36:605

    Article  CAS  Google Scholar 

  3. Fink D, Petrov AV, Hoppe K, Fahrner WR et al (2004) Nucl Instr Meth B218:355

    Article  Google Scholar 

  4. Fink D, Alegaonkar PS, Petrov AV, Wilhelm M, Szimkowiak P, Behar M, Sinha D, Fahrner WR, Hoppe K, Chadderton LT (2005) Nucl Instr Meth B236:11

    Article  Google Scholar 

  5. Sinha D, Petrov AV, Fink D, Fahrner WR, Hoppe K, Chandra A (2004) Radiat Effects Defects Solids 159:517

    Article  CAS  Google Scholar 

  6. Fink D, Sinha D, Opitz-Coutureau J, Petrov AV, Demyanov SE, Fahrner WR, Hoppe K, Fedotov AK, Chadderton LT, Berdinsky AS (2005) In: Borisenko VE, Gaponenko SV, Gurin VS (eds) Physics, chemistry and application of nanostructures. World Scientific Pubs., p 474

  7. Ivanou DK, Streltsov EA, Fedotov AK, Mazanik AV, Fink D, Petrov A, Tkazyk Z, Wosinski T, Figielski T (2005) In: Pődör B, Horváth J, Basa P (eds) Semiconductor nanocrystals (Proc. of the 1st Intern. Workshop on Semicond. Nanocrystals “SEMINANO-2005”, Budapest, Hungary, September 2005), p 63

  8. Ivanou DK, Streltsov EA, Fedotov AK, Mazanik AV, Fink D, Petrov A (2005) Thin Solid Films 490:154

    Article  CAS  Google Scholar 

  9. Ubara H, Imura T, Hiraki A (1984) Solid State Commun 50:673

    Article  CAS  Google Scholar 

  10. Niwa D, Takano N, Yamada T, Osaka T (2003) Electrochim Acta 48:195

    Article  Google Scholar 

  11. Gurevich YuYa, Pleskov YuV (1983) Photoelektrokhimija poluprovodnikov. Nauka, Moscow, p 176 (in Russian)

  12. Rashkova B, Guel B, Pötzschke RT, Staikov G (1998) Electrochim Acta 43:3021

    Article  CAS  Google Scholar 

  13. Munoz AG (2006) Surf Coat Technol 201:3030

    Article  CAS  Google Scholar 

  14. Oskam G, Long JG, Natarajan A, Searson PC (1998) J Phys D: Appl Phys 31:1927

    Article  CAS  Google Scholar 

  15. Pasa AA, Munford ML, Voltolini E, Seligmana L, Sardelab M, Sartorelli ML (2001) In: Proceedings of the magnetic materials, processes, and devices VI. The Electrochemical Society, vol 2000, p 137

  16. Ji C, Oskam G, Searson PC (2001) Surf Sci 492:115

    Article  CAS  Google Scholar 

  17. Ivanova YuA, Ivanou DK, Streltsov EA (2007) Electrochem Commun 9:599

    Article  CAS  Google Scholar 

  18. Ivanova YuA, Ivanou DK, Streltsov EA (2007) Electrochim Acta 52:5213

    Article  CAS  Google Scholar 

  19. Gunawardena G, Hills G, Montenegro I, Scharifker B (1982) J Electroanal Chem 138:225

    Article  CAS  Google Scholar 

  20. Krumm R, Guel B, Schmitz C, Staikov G (2000) Electrochim Acta 45:3255

    Article  CAS  Google Scholar 

  21. Pasa AA, Scharzacher W (1999) Phys Stat Sol(a) 173:73

    Article  CAS  Google Scholar 

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Acknowledgement

This work was supported by the Belarusian Foundation for Basic Research (Project X07M-128).

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Correspondence to E. A. Streltsov.

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Ivanova, Y.A., Ivanou, D.K., Fedotov, A.K. et al. Electrochemical deposition of Ni and Cu onto monocrystalline n-Si(100) wafers and into nanopores in Si/SiO2 template. J Mater Sci 42, 9163–9169 (2007). https://doi.org/10.1007/s10853-007-1926-x

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  • DOI: https://doi.org/10.1007/s10853-007-1926-x

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