Journal of Materials Science

, Volume 40, Issue 18, pp 4991–4993 | Cite as

MOCVD route to In2O3 thin films on SiO2 substrates



Polymer Thin Film SiO2 In2O3 SiO2 Substrate 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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This work was supported by grant No. R05-2004-000-10762-0 from the Basic Research Program of the Korea Science & Engineering Foundation.


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Copyright information

© Springer Science + Business Media, Inc 2005

Authors and Affiliations

  1. 1.School of Material Science and EngineeringInha University Yong Hyun DongRepublic of Korea

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