Effect of excess PbO on microstructure and orientation of PZT(60/40) films
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Lead zirconate titanate [PZT(60/40)] films were deposited by RF-magnetron sputtering using single oxide targets with various levels of excess PbO. The excess PbO in the film played an important role in the pyrochlore-to-perovskite transformation, nucleation and growth processes, orientation control, and crack formation. When 5% or 20% excess PbO was added to the target, pyrochlore phases were created and the films were severely cracked. However, the films had a perovskite structure without any pyrochlore phases when 10% or 15% excess PbO was added to the targets. More interestingly, the crystallographic orientation was strongly dependant on the excess PbO content. A film with a (111) preferred orientation was produced when 10% excess PbO was added to the target. On the other hand, a film with a (100) preferred orientation was deposited by the target with 15% excess PbO. The dielectric, ferroelectric and piezoelectric properties of these films with different orientations and microstructures were examined and correlated with the film structure.
KeywordsPZT film Piezoelectric Microstructure
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