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Journal of Electroceramics

, Volume 23, Issue 2–4, pp 361–366 | Cite as

Electrical, optical, and structural properties of ITO co-sputtered IZO films by dual target magnetron sputtering

  • Jin-A Jeong
  • Kwang-Hyuk Choi
  • Jung-Hyeok Bae
  • Jong-Min Moon
  • Soon Wook Jeong
  • Insoo Kim
  • Han-Ki Kim
  • Min-Su Yi
Article

Abstract

We have investigated electrical, optical, and structural properties of indium tin oxide (ITO) co-sputtered indium zinc oxide (IZO) film prepared by a dual target direct current (DC) magnetron sputtering at room temperature in pure Ar ambient. It was shown that the resistivity and sheet resistance of ITO co-sputtered IZO films monotonically increased with increasing DC power of ITO target at constant DC power of IZO target. Synchrotron X-ray scattering and scanning electron microscope examination results show that addition of ITO in the IZO film lead to crystallization of IZTO film due to low transition temperature of the ITO from amorphous to crystalline. However, ITO co-sputtered IZO film (ITO/IZO power = 100 W:100 W) exhibit higher work function than those of pure IZO and ITO film. It was found that the work function as well as the electrical, optical, and surface properties of the IZTO film could be controlled by varying the DC power of IZO and ITO targets, respectively.

Keywords

Co-sputtered IZO ITO IZTO Work function DC magnetron sputter 

Notes

Acknowledgement

This work was supported by Korea Research Foundation Grant funded by Korea Government (MOEHRD: Basic Research Promotion Fund) (KRF-2006-331-D00243).

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Copyright information

© Springer Science+Business Media, LLC 2008

Authors and Affiliations

  • Jin-A Jeong
    • 1
  • Kwang-Hyuk Choi
    • 1
  • Jung-Hyeok Bae
    • 1
  • Jong-Min Moon
    • 1
  • Soon Wook Jeong
    • 1
  • Insoo Kim
    • 1
  • Han-Ki Kim
    • 1
  • Min-Su Yi
    • 2
  1. 1.School of Advanced Materials and Systems EngineeringKumoh National Institute of Technology (KIT)GumiSouth Korea
  2. 2.Department of Materials Science and EngineeringKyoungbuk National UniversitySangjuSouth Korea

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