The square bar-shaped multi-DOF ultrasonic motor
In this paper a multi-degree-of-freedom (multi-DOF) ultrasonic motor consisting of a square bar-shaped stator and a spherical or plate type rotor was developed. It can generate multi-DOF rotation of the rotor using “shaking beam” principle of linear motion formation based on previous researches. The multi-DOF rotation generated by four contacting points of a square bar-shaped actuator using four d31 piezoelectric plates. The computer simulation by finite element analysis of proposed system is given. The authors used precision laser equipment for testing and measuring both contacting points and surfaces of square bar-shaped actuator.
KeywordsUltrasonic motor Multi-DOF Shaking beam FEM
The authors would like to thank to scientific staff of the Laboratory of Mechatronic and Dynamic (Paderborn University) for measurement assistance.
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