The nanoparticles electrophoretic deposition (EPD) of barium titanate (BaTiO3 or BTO) thin films was investigated. BTO nanocrystallites in a pseudocubic perovskite phase with an average particle size of about 10 nm were synthesized at a low temperature of 90°C by a high-concentration sol–gel process. By using a mixed solvent of 2-methoxyethanol and acetylacetone as dispersing medium, transparent and well-dispersed BTO nanocrystallites suspensions within the concentration range of 0.0125 to 0.20 mol/l was successfully prepared for nanoparticles EPD. A uniform microstructure and a smooth surface were observed on the deposited films. The film thickness of the deposited films increased rapidly with increasing EPD time in the initial period of EPD, and thereafter gradually increased to a limited thickness. With increasing applied EPD voltage, the limited film thickness increased. A near linear relation between the film thickness of films and the concentration of suspensions was observed under the same EPD conditions. The microstructures of the deposited BTO thin films were investigated.
Barium titanate Electrophoretic deposition Thin film Sol–gel process Nanocrystallite
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This work is partially supported by a Grant-in-Aid (no. 16206065) from the Japan Society for the Promotion of Science (JSPS). Y. J. Wu is grateful to the JSPS for a fellowship.