Abstract
The compositionally graded Ba(Zr x Ti1−x )O3 films with a compositional gradient from BaTiO3 to BaZr0.35Ti0.65O3 were fabricated on LNO-buffered Pt/Ti/SiO2/Si substrates by a sol-gel deposition method. In order to confirm the compositional gradient, a combination of X-ray Photoelectron Spectroscopy (XPS) and Ar ion etching was employed to produce the composition depth profile. Dielectric constant peaks, common to a ferroelectric transition, were not observed in the temperature range from −50 to 100 °C, within which the dielectric constant showed negligible temperature dependence. The compositionally graded Ba(Zr x Ti1−x )O3 thin films with weak temperature dependence of tunability could be attractive materials for situations in which precise control of temperature would be either impossible or too expensive.
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Acknowledgements
This research was supported by the Ministry of Sciences and Technology of China through 973-project under grant 2002CB613304 and the Specialized Research Fund for the Doctoral Program of Higher Education. This research was also supported by Program for New Century Excellent Talents in University and Shanghai Pujiang Program.
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Zhai, J., Gao, C., Yao, X. et al. The tunability and dielectric properties of the compositionally graded Ba(Zr x Ti1−x )O3 thin films. J Electroceram 21, 12–16 (2008). https://doi.org/10.1007/s10832-007-9074-x
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DOI: https://doi.org/10.1007/s10832-007-9074-x