Effect of nano-sized TiO2 powder on Ag-electrode in piezoelectric multilayer devices
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The objective of this study is to present sintering shrinkage behavior of Ag-Pd electrode powders with TiO2 nano-particle addition and the matching characteristics to a piezoelectric ceramics, Pb(Zr,Ti)O3. The densification of the nanoparticle TiO2-added electrode paste followed the TiO2 solid state diffusion-controlled mechanism upon sintering process. Reaction between ceramic and electrode layers with the TiO2 nano-particle powder allows internal stress to be reduced and mechanical bonding strength to be increased. High adhesive strength and good electrical conductivity of more than 104/Ω cm could be obtained in the multilayer ferroelectric structure. In order to understand the effectiveness of the nano-TiO2 doped electrode for multilayer device, the multilayer ceramic actuators containing Ag-based electrode without and with nano-sized TiO2 powder were fabricated and evaluated each other. Both the samples exhibited similar piezoelectric and dielectric properties.
KeywordsNano-sized TiO2 particle Ag-Pd electrode Sintering Adhesion Electric conductivity
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