Journal of Electroceramics

, Volume 17, Issue 2–4, pp 695–699 | Cite as

Three dimensional arrays of hollow gadolinia-doped ceria microspheres prepared by r.f. magnetron sputtering employing PMMA microsphere templates

  • Takeo Hyodo
  • Anja Bieberle-Hütter
  • Joshua L. Hertz
  • Harry L. Tuller
2. Energy: Fuel cells, batteries etc.


Preparation of macroporous gadolinia-doped ceria (CGO) films was attempted by r.f. magnetron sputtering. A polymethylmethacrylate (PMMA) microsphere film was fabricated as a template on a Pt-coated silicon substrate by dripping a PMMA microsphere aqueous dispersion onto the substrate. CGO was deposited onto the PMMA microspheres by sputtering; the PMMA microspheres were found to shrink during the sputtering, and thus the CGO also coated the surface of PMMA microspheres beneath the top layer of the film. Films (ca. 1.5 μm thick) consisting of three dimensional arrays of hollow CGO microspheres (ca. 700 nm in diameter) with large porosity were obtained after annealing the CGO/PMMA microsphere composite film.


Macroporous film Hollow microsphere CGO PMMA Sputtering 


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Copyright information

© Springer Science + Business Media, LLC 2006

Authors and Affiliations

  • Takeo Hyodo
    • 1
    • 2
  • Anja Bieberle-Hütter
    • 1
    • 3
  • Joshua L. Hertz
    • 1
  • Harry L. Tuller
    • 1
  1. 1.Department of Materials Science and EngineeringMassachusetts Institute of TechnologyCambridgeUSA
  2. 2.Department of Materials Science and Engineering, Faculty of EngineeringNagasaki UniversityNagasakiJapan
  3. 3.Department of MaterialsETH ZürichZürichSwitzerland

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