Strain effects in SiN-passivated GaN-based HEMT devices
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The use of a passivating layer can reduce or even eliminate surface effects responsible for limiting both the RF current and breakdown voltage of AlGaN/GaN HEMTs. To study the effect of passivation on electrical characteristics of GaN-based devices, we have developed a macroscopic model of strain in SiN/AlGaN/GaN heterostructure, considering the system as a free-standing one. Basing on the strain results, we have calculated the strain map for a SiN-passivated structure and the electron sheet charge density in the channel. Results have been compared with experimental measurements and with an alternative passivation model.
KeywordsSurface charges HEMT Nitrides Strain Piezoelectric effect
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