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Inorganic Materials

, Volume 41, Issue 8, pp 812–818 | Cite as

Hydrogenated Nanoporous Diamond Films

  • A. V. Khomich
  • V. P. Varnin
  • I. G. Teremetskaya
  • N. A. Poklonskii
  • N. M. Lapchuk
  • A. O. Korobko
Article

Abstract

Nanoporous diamond films up to 20 µm thick with a pore size of 1–1.5 nm and porosities from 0.4 to 0.6 are produced by selective etching in air. The effect of hydrogen plasma processing on the IR absorption and electron paramagnetic resonance spectra of the films is investigated. The results indicate that the concentration of bonded hydrogen in the hydrogenated nanoporous diamond films attains 20 at %. The kinetics of hydrogen desorption are studied as a function of temperature.

Keywords

Hydrogen Porosity Inorganic Chemistry Pore Size Electron Paramagnetic Resonance 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© MAIK “Nauka/Interperiodica” 2005

Authors and Affiliations

  • A. V. Khomich
    • 1
  • V. P. Varnin
    • 2
  • I. G. Teremetskaya
    • 2
  • N. A. Poklonskii
    • 3
  • N. M. Lapchuk
    • 3
  • A. O. Korobko
    • 3
  1. 1.Institute of Radio Engineering and Electronics (Fryazino Branch)Russian Academy of SciencesFryazino, Moscow oblastRussia
  2. 2.Institute of Physical ChemistryRussian Academy of SciencesMoscowRussia
  3. 3.Belarussian State UniversityMinskBelarus

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