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Inorganic Materials

, Volume 41, Issue 3, pp 243–246 | Cite as

Electrical properties of films grown on W and Mo substrates by titanium ion implantation in nitrogen atmosphere

  • P. I. Ignatenko
  • M. Yu. Badekin
Article
  • 25 Downloads

Abstract

Films consisting of alternating nitride and oxide layers differing in phase composition and structure are grown on polycrystalline tungsten and molybdenum substrates by ion implantation. The resistivity and thermoelectric power of the films are measured as functions of temperature, and the temperature coefficient of their resistance is determined. The phase composition and electrical properties of the films are shown to be governed by the nitrogen-ion dose delivered to the titanium target.

Keywords

Oxide Atmosphere Titanium Tungsten Molybdenum 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© MAIK “Nauka/Interperiodica” 2005

Authors and Affiliations

  • P. I. Ignatenko
    • 1
  • M. Yu. Badekin
    • 1
  1. 1.Donetsk National UniversityDonetskUkraine

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