Inorganic Materials

, Volume 41, Issue 3, pp 207–211 | Cite as

Oxidation of vanadium films on InP substrates

  • I. Ya. Mittova
  • E. V. Tomina
  • A. A. Lapenko


The kinetics and mechanism of the thermal oxidation of V/InP structures in flowing oxygen are investigated by x-ray diffraction and IR spectroscopy. The results demonstrate that the oxidation of thin (25 nm) vanadium films yields various oxides, which accelerate the oxidation of indium phosphide, leading to the formation of multiphase dielectric layers through a number of parallel reactions.


Oxidation Oxygen Spectroscopy Indium Inorganic Chemistry 
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Copyright information

© MAIK “Nauka/Interperiodica” 2005

Authors and Affiliations

  • I. Ya. Mittova
    • 1
  • E. V. Tomina
    • 1
  • A. A. Lapenko
    • 1
  1. 1.Voronezh State UniversityVoronezhRussia

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