Simultaneous Measurement of Thermal Conductivity and Specific Heat in a Single TDTR Experiment

  • Fangyuan Sun
  • Xinwei Wang
  • Ming Yang
  • Zhe Chen
  • Hang Zhang
  • Dawei Tang
ATPC 2016
Part of the following topical collections:
  1. Asian Thermophysical Properties Conference Papers


Time-domain thermoreflectance (TDTR) technique is a powerful thermal property measurement method, especially for nano-structures and material interfaces. Thermal properties can be obtained by fitting TDTR experimental data with a proper thermal transport model. In a single TDTR experiment, thermal properties with different sensitivity trends can be extracted simultaneously. However, thermal conductivity and volumetric heat capacity usually have similar trends in sensitivity for most materials; it is difficult to measure them simultaneously. In this work, we present a two-step data fitting method to measure the thermal conductivity and volumetric heat capacity simultaneously from a set of TDTR experimental data at single modulation frequency. This method takes full advantage of the information carried by both amplitude and phase signals; it is a more convenient and effective solution compared with the frequency-domain thermoreflectance method. The relative error is lower than 5 % for most cases. A silicon wafer sample was measured by TDTR method to verify the two-step fitting method.


Specific heat Thermal conductivity Thermal property Time-domain thermoreflectance Two-step fitting method 



F.S. thanks the financial support from National Natural Science Foundation of China (Grant Nos. 51606193 & 51373184) and Ministry of Science and Technology of the People’s Republic of China (Grant No. 2013YQ120355). H.Z. thanks the financial support from CAS Pioneer Hundred Talents Program.


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Authors and Affiliations

  1. 1.Institute of Engineering ThermophysicsChinese Academy of SciencesBeijingChina
  2. 2.University of Chinese Academy of SciencesBeijingChina
  3. 3.College of Pipeline and Civil EngineeringChina University of PetroleumQingdaoChina
  4. 4.Key Laboratory of Ocean Energy Utilization and Energy Conservation of Ministry of EducationDalian University of TechnologyDalianChina

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