Analysis of Possibilities of Application of Nanofabricated Thermal Probes to Quantitative Thermal Measurements
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A steady-state thermal model of the nanofabricated thermal probe was proposed. The resistive type probe working in the active mode was considered. The model is based on finite element analysis of the temperature field in the probe-sample system. Determination of the temperature distribution in this system allows calculations of relative changes in the probe electrical resistance. It is shown that the modeled probe can be used for measurements of the local thermal conductivity with the spatial resolution determined by the probe apex dimensions. The probe exhibits the maximum sensitivity to the changes in the thermal conductivity of the sample between 2 W·m−1 ·K−1 and 200 W·m−1 ·K−1. The influence of the thermal conductivity of the probe substrate on metrological characteristics of the probe as well as the thermal resistance of the probe-sample contact on the determination of the sample thermal conductivity were also analyzed. The selected results of numerical analysis were compared with data of preliminary experiments.
KeywordsFinite element analysis Nanofabricated thermal probe Scanning thermal microscopy Thermal conductivity Thermal measurement
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