High-Speed Coplanar Waveguide Based Submount for 40 Gbit/s Electroabsorption Modulator
- 39 Downloads
A high-speed submount has been designed and fabricated for 40 Gb/s electroabsorption (EA) modulators. The submount contains a coplanar waveguide (CPW) for microwave signal feeding and a Ta2N thin-film resistor for impedance matching. The CPW transmission line is designed to ensure low microwave loss and reflection, and Ti/Cu/Ni/Au metal is adopted for electrode fabrication to guarantee good contact with the Ta2N thin-film. The typical reflection coefficient of fabricated submount is estimated to be lower than−21 dB up to 40 GHz. As a demonstration, a high-speed EA modulator was chip-level packaged using the high-speed submount, and the measured small-signal modulation bandwidth was over 40 GHz.
Keywords:High-speed submount Low-Loss Coplanar Waveguide (CPW) Thin-Film Resistor 40 Gb/s Electroabsorption (EA) Modulator
Unable to display preview. Download preview PDF.
-  N. Mineo, K. Nagai and T. Ushikubo, “Ultra wide-band electroabsorption modulator modules for DC to millimeter-wave band”, presented at 2001 International Topical Meeting on Microwave Photonics. Technical Digest. MWP'01, 7–9 Jan. 2002, Long Beach, CA, USA, 2001.Google Scholar
-  R. Henderson, P. Zurcher, A. Duvallet, C. Happ, M. Petras, M. Raymond, T. Remmel, D. Roberts, B. Steimle, S. Straub, T. Sparks, M. Tarabbia and M. Miller, “Tantalum nitride thin film resistors for integration into copper metallization based RF-CMOS and BiCMOS technology platforms”, presented at Silicon Monolithic Integrated Circuits in RF Systems, 2001. Digest of Papers. 2001 Topical Meeting on, 2001.Google Scholar
-  J. M. Poate, K. N. Tu and J. W. Mayer, “Thin films: interdiffusion and reactions”, New York: Wiley, 1978.Google Scholar
-  J. M. Morabito, J. H. Thomas and N. G. Lesh, “Material characterisation of Ti-Cu-Ni-Au (TCNA)-a new low cost thin film conductor system”, IEEE Transactions on Parts, Hybrids and Packaging, vol. PHP-11, pp. 253–62, 1975.Google Scholar