Advertisement

Glass Physics and Chemistry

, Volume 31, Issue 3, pp 356–363 | Cite as

Mechanical Properties and Residual Stress Measurements in Anodic Aluminium Oxide Structures Using Nanoindentation

  • S. H. Ko
  • D. W. Lee
  • S. E. Jee
  • H. C. Park
  • K. H. Lee
  • W. Hwang
Proceedings of the Topical Meeting of the European Ceramic Society “Nanoparticles, Nanostructures, and Nanocomposites” (St. Petersburg, Russia, July 5–7, 2004)

Abstract

Anodic alumina has been used widely for corrosion protection of aluminum surfaces or as a dielectric material in microelectronics applications. It exhibits a homogeneous morphology of parallel pores that can easily be controlled between 10 and 400 nm. It has been applied as a template for fabrication of the nanometer-scale composite. In this study, the mechanical properties of anodic aluminum oxide (AAO) structures are measured by the nanoindentation method. The nanoindentation technique is one of the most effective methods to measure the mechanical properties of nanostructures. Using the nanoindentation method, we investigated the residual stress and mechanical properties such as the indentation modulus and hardness of the AAO structure with different-sized nanoholes. As a result, we find that the “hole effect” that changes the mechanical properties is the hole size.

Keywords

Oxide Aluminum Mechanical Property Residual Stress Dielectric Material 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

REFERENCES

  1. 1.
    Sneddon, The Relation between Load and Penetration in the Axisymmetric Boussinesq Problem for a Punch of Arbitrary Profile, Int. J. Eng. Sci., 1965, vol. 3, pp. 47–57.Google Scholar
  2. 2.
    Oliver, W.C. and Pharr, G.M., An Improved Technique for Determining Hardness and Elastic Modulus Using Load and Displacement Sensing Indentation Experiments, J. Mater. Res., 1992, vol. 7, pp. 1564–1583.Google Scholar
  3. 3.
    Lu, Q., Alcala, G., Skeldon, P., Thompson, G.E., Graham, M.J., Masheder, D., Shimizu, K., and Habazaki, H., Porous Tantala and Alumina Film from Non-Thickness Limited Anodizing in Phosphate/Glycerol Electrolyte, Electrochim. Acta, 2002, vol. 48, pp. 37–42.Google Scholar
  4. 4.
    Alcala, G., Skeldon, P., Thompson, G.E., Mann, A.B., Habazaki, H., and Shimizu, K., Mechanical Properties of Amorphous Anodic Alumina and Tantala Films Using Nanoindentation, Nanotechnology, 2002, vol. 13, pp. 451–455.Google Scholar
  5. 5.
    Noyan, I.C. and Cohen, J.B., Residual Stress, NewYork: Springer-Verlag, 1987.Google Scholar
  6. 6.
    Ruud, C.O., Dimascio, P.S., and Yavelak, J.J., Comparison of Three Residual-Stress Measurement Methods on a Mild Steel, Exp. Mech., 1985, vol. 25, pp. 338–343.Google Scholar
  7. 7.
    Joo, J.W. and Park, C.K., Determination of Non-Uniform Residual Stress by the Hole Drilling Method, Trans. KSME, A, 1998, vol. 22, pp. 268–277.Google Scholar
  8. 8.
    Lee, Y.H., Jang, H., and Kwon, D., Evaluation of Thin Film Residual Stress through the Theoretical Analysis of Nanoindentation Curve, J. KSME, 2002, vol. 26, no.7, pp. 1270–1279.Google Scholar
  9. 9.
    Hwang, S.K., Jeong, S.H., Hwang, H.Y., Lee, O.J., and Lee, K.H., Fabrication of Highly Ordered Pore Array in Anodic Aluminum Oxide, Korean J. Chem. Eng., 2002, vol. 19, no.3, pp. 467–473.Google Scholar
  10. 10.
    Doener, M.F. and Nix, W.D., A Method for Interpreting the Data from Depth-Sensing Indentation Instruments, J.Mater. Res., 1986, vol. 1, pp. 601–609.Google Scholar
  11. 11.
    Goveyadinov, A., Mardilovich, P., Novogradecz, K., Hooke, S.., and Routkevitch, D., Anodic Alumina MEMS: Applications and Devices, J. MEMS, 2000, vol. 2, pp. 313–318.Google Scholar
  12. 12.
    Ishizaki, Sheppard, Okada, Hamasaki, and Huybrechts, Ceramic Transaction—Porous Materials, Am. Ceram. Soc., 1993, vol. 31, pp. 233–242.Google Scholar

Copyright information

© MAIK “Nauka/Interperiodica” 2005

Authors and Affiliations

  • S. H. Ko
    • 1
  • D. W. Lee
    • 1
  • S. E. Jee
    • 2
  • H. C. Park
    • 1
  • K. H. Lee
    • 2
  • W. Hwang
    • 1
  1. 1.Department of Mechanical EngineeringPohang University of Science and TechnologyPohang, KyungbukKorea
  2. 2.Department of Chemical EngineeringPohang University of Science and TechnologyPohang, KyungbukKorea

Personalised recommendations