Abstract
Anodic alumina has been used widely for corrosion protection of aluminum surfaces or as a dielectric material in microelectronics applications. It exhibits a homogeneous morphology of parallel pores that can easily be controlled between 10 and 400 nm. It has been applied as a template for fabrication of the nanometer-scale composite. In this study, the mechanical properties of anodic aluminum oxide (AAO) structures are measured by the nanoindentation method. The nanoindentation technique is one of the most effective methods to measure the mechanical properties of nanostructures. Using the nanoindentation method, we investigated the residual stress and mechanical properties such as the indentation modulus and hardness of the AAO structure with different-sized nanoholes. As a result, we find that the “hole effect” that changes the mechanical properties is the hole size.
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REFERENCES
Sneddon, The Relation between Load and Penetration in the Axisymmetric Boussinesq Problem for a Punch of Arbitrary Profile, Int. J. Eng. Sci., 1965, vol. 3, pp. 47–57.
Oliver, W.C. and Pharr, G.M., An Improved Technique for Determining Hardness and Elastic Modulus Using Load and Displacement Sensing Indentation Experiments, J. Mater. Res., 1992, vol. 7, pp. 1564–1583.
Lu, Q., Alcala, G., Skeldon, P., Thompson, G.E., Graham, M.J., Masheder, D., Shimizu, K., and Habazaki, H., Porous Tantala and Alumina Film from Non-Thickness Limited Anodizing in Phosphate/Glycerol Electrolyte, Electrochim. Acta, 2002, vol. 48, pp. 37–42.
Alcala, G., Skeldon, P., Thompson, G.E., Mann, A.B., Habazaki, H., and Shimizu, K., Mechanical Properties of Amorphous Anodic Alumina and Tantala Films Using Nanoindentation, Nanotechnology, 2002, vol. 13, pp. 451–455.
Noyan, I.C. and Cohen, J.B., Residual Stress, NewYork: Springer-Verlag, 1987.
Ruud, C.O., Dimascio, P.S., and Yavelak, J.J., Comparison of Three Residual-Stress Measurement Methods on a Mild Steel, Exp. Mech., 1985, vol. 25, pp. 338–343.
Joo, J.W. and Park, C.K., Determination of Non-Uniform Residual Stress by the Hole Drilling Method, Trans. KSME, A, 1998, vol. 22, pp. 268–277.
Lee, Y.H., Jang, H., and Kwon, D., Evaluation of Thin Film Residual Stress through the Theoretical Analysis of Nanoindentation Curve, J. KSME, 2002, vol. 26, no.7, pp. 1270–1279.
Hwang, S.K., Jeong, S.H., Hwang, H.Y., Lee, O.J., and Lee, K.H., Fabrication of Highly Ordered Pore Array in Anodic Aluminum Oxide, Korean J. Chem. Eng., 2002, vol. 19, no.3, pp. 467–473.
Doener, M.F. and Nix, W.D., A Method for Interpreting the Data from Depth-Sensing Indentation Instruments, J.Mater. Res., 1986, vol. 1, pp. 601–609.
Goveyadinov, A., Mardilovich, P., Novogradecz, K., Hooke, S.., and Routkevitch, D., Anodic Alumina MEMS: Applications and Devices, J. MEMS, 2000, vol. 2, pp. 313–318.
Ishizaki, Sheppard, Okada, Hamasaki, and Huybrechts, Ceramic Transaction—Porous Materials, Am. Ceram. Soc., 1993, vol. 31, pp. 233–242.
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Original English Text Copyright © 2005 by Fizika i Khimiya Stekla, Ko, D. Lee, Jee, Park, K. Lee, Hwang.
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Ko, S.H., Lee, D.W., Jee, S.E. et al. Mechanical Properties and Residual Stress Measurements in Anodic Aluminium Oxide Structures Using Nanoindentation. Glass Phys Chem 31, 356–363 (2005). https://doi.org/10.1007/s10720-005-0069-x
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DOI: https://doi.org/10.1007/s10720-005-0069-x