Use of Alkaline Glass in Micromechanical Sensor Structures

The use of alkali glass in micromechanical sensors, specifically, accelerometers, is shown. Alkali glass is used in the sensitive elements of the indicated devices. The main technological operation in the assembly of such sensitive elements is electrostatic bonding, also known as the anodic bonding. In this process a number of complex physical effects occur in the glass. Reliable functioning of the fabricated devices depends on the quality of the execution of the parts made of alkali glass and silicon.

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Correspondence to V. E. Pautkin.

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Translated from Steklo i Keramika, No. 4, pp. 28 – 31, April, 2019.

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Pautkin, V.E. Use of Alkaline Glass in Micromechanical Sensor Structures. Glass Ceram 76, 142–144 (2019). https://doi.org/10.1007/s10717-019-00151-0

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Key words

  • alkali glass
  • micromechanical sensor
  • sensitive element
  • electrostatic bonding