A study is made of the surface quality of three types of corundum materials for microcircuit substrates. It is shown that after grinding and polishing the surface quality depends on the size of the crystals in the ceramic, which is determined largely by the particle-size of the initial powder and additions and the sintering regime.
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Translated from Steklo i Keramika, No. 9, pp. 9 – 14, September, 2010.
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Lukin, E.S., Anufrieva, E.V., Popova, N.A. et al. Analysis of surface microstructure and quality and properties of aluminum oxide substrates. Glass Ceram 67, 271–276 (2011). https://doi.org/10.1007/s10717-011-9278-z
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DOI: https://doi.org/10.1007/s10717-011-9278-z