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Glass and Ceramics

, Volume 67, Issue 9–10, pp 271–276 | Cite as

Analysis of surface microstructure and quality and properties of aluminum oxide substrates

  • E. S. Lukin
  • E. V. Anufrieva
  • N. A. Popova
  • B. A. Morozov
  • V. S. Preobrazhenskii
  • V. A. Bezlepkin
  • L. S. Ukhvatova
  • G. V. Brzhezinskii
Science for Ceramic Production

A study is made of the surface quality of three types of corundum materials for microcircuit substrates. It is shown that after grinding and polishing the surface quality depends on the size of the crystals in the ceramic, which is determined largely by the particle-size of the initial powder and additions and the sintering regime.

Key words

corundum ceramic polycore KORAL-3 alumina microstructure size of crystals surface purity profilogram 

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References

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Copyright information

© Springer Science+Business Media, Inc. 2011

Authors and Affiliations

  • E. S. Lukin
    • 1
  • E. V. Anufrieva
    • 1
  • N. A. Popova
    • 1
  • B. A. Morozov
    • 2
  • V. S. Preobrazhenskii
    • 2
  • V. A. Bezlepkin
    • 2
  • L. S. Ukhvatova
    • 3
  • G. V. Brzhezinskii
    • 4
  1. 1.D. I. Mendeleev Russian Chemical Technical UniversityMoscowRussia
  2. 2.Polikor JSCKineshmaRussia
  3. 3.Scientific – Research Institute of Measurement SystemsNizhny NovgorodRussia
  4. 4.Region Center – Nano-IndustryNizhny NovgorodRussia

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