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Czechoslovak Journal of Physics

, Volume 56, Supplement 2, pp B1212–B1217 | Cite as

A study of barrier-torch plasma jet system at atmospheric pressure

  • M. Chichina
  • M. Tichý
  • P. Kudrna
  • A. Grinevich
  • O. Churpita
  • Z. Hubička
  • S. Kment
  • J. Olejníček
Article

Abstract

We report on the application of barrier-torch plasma jet system — the novel plasma deposition system capable of working at atmospheric pressure in open air. Properties of ZnO and TiO2 thin films were analyzed by XRD and AFM. In the contribution we present the first results of spectroscopic measurements of Balmer Hβ line width aimed at estimating the electron density in plasma jet at atmospheric pressure.

Key words

plasma jet plasma density atmospheric pressure plasma thin films 

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Copyright information

© Institute of Physics, Academy of Sciences of Czech Republic 2006

Authors and Affiliations

  • M. Chichina
    • 1
  • M. Tichý
    • 1
  • P. Kudrna
    • 1
  • A. Grinevich
    • 1
  • O. Churpita
    • 2
  • Z. Hubička
    • 2
  • S. Kment
    • 2
  • J. Olejníček
    • 2
  1. 1.Faculty of Mathematics and PhysicsCharles University in PraguePragueCzech Republic
  2. 2.Institute of Physics, Division of OpticsAcademy of Sciences of the Czech RepublicPrague 8Czech Republic

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