Czechoslovak Journal of Physics

, Volume 55, Issue 4, pp 497–502 | Cite as

Molecular dynamics study of the sputtering of Al cluster by Ar and Kr atoms

  • Vítězslav Král


The numerical studies of the dynamics of the crystaline lattice formed by atoms requires the detailed knowledge of the forces between these atoms. In our contribution we concentrate on molecular dynamics study of sputtering of Al cluster in the form of the cube (i.e. eight Al atoms). The sputtering is due to impact of Ar and Kr atoms of energy 550 eV. We compare the use of the potential between atoms either of Molière type or the embedded atom potential which has been proposed recently. For the choice of both potential the spectra of sputtered particles were calulated and the comparison was made.

Key words

molecular dynamics sputtering of atoms interatomic potential 


  1. [1]
    P. Sigmund: Rev. Roum. Phys. 17 (1970) 823.Google Scholar
  2. [2]
    K.B. Winterbon, P. Sigmund, and J.B. Sanders: Danske Videnskab Selskab. 37 (1970) 14.Google Scholar
  3. [3]
    Y.H. Ohtsuki: Charged Beam Interaction with Solids, Taylor and Francis, London, 1983.Google Scholar
  4. [4]
    G. Molière: Z. Naturf. A 2 (1947) 283.Google Scholar
  5. [5]
    O.B. Firsov: Zh. Eksp. Teor. Fiz. 32 (1957) 1464.Google Scholar
  6. [6]
    Q.D. Wilson, L.G. Haggmark, and J.P. Biersack: Phys. Rev. B. 15 (1977) 2458.CrossRefGoogle Scholar
  7. [7]
    M.H. Shapiro and T.A. Tombrello: Nucl. Instr. Meth. B 84 (1994) 453.Google Scholar
  8. [8]
    T.A. Tombrello and V. Fine: Nucl. Instr. Meth. B. 44 (1989) 43.Google Scholar
  9. [9]
    M.S. Daw and M.I. Baskes: Phys. Rev. B. 29 (1984) 6443.CrossRefGoogle Scholar
  10. [10]
    S.M. Foiles, M.I. Baskes, and M.S. Daw: Phys. Rev. B 33 (1986) 7988.CrossRefGoogle Scholar
  11. [11]
    M.I. Baskes and M.S. Daw: Phys. Lett. 50 (1983) 1285.CrossRefGoogle Scholar
  12. [12]
    Landolt-Bernstein: Numerical Data, New Series, Group III, Vol. L8, Springer, 1984.Google Scholar
  13. [13]
    E. Clementi and C. Roetti: At. Data Nucl. Data Tables 14 (1974) 177.Google Scholar
  14. [14]
    S.R. Coon et al.: Surf. Sci. 259 (1991) 275.CrossRefGoogle Scholar
  15. [15]
    R. Behrish and K. Wittmaack: Sputtering by Particle Bombardement, Vol. III, Springer, 1991.Google Scholar
  16. [16]
    J.J. Vrakking and A. Kroes: Surf. Sci. 84 (1979) 153.CrossRefGoogle Scholar
  17. [17]
    K. Rödelsperder and A. Scharmann: Nucl Instr. Meth. 132 (1976) 355.CrossRefGoogle Scholar
  18. [18]
    A. Wucher and B.J. Garrison: Phys. Rev. B 46 (1991) 4855.CrossRefGoogle Scholar

Copyright information

© Institute of Physics, Academy of Sciences of Czech Republic 2005

Authors and Affiliations

  • Vítězslav Král
    • 1
  1. 1.Praha 4Czech Republic

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