Czechoslovak Journal of Physics

, Volume 55, Issue 4, pp 497–502 | Cite as

Molecular dynamics study of the sputtering of Al cluster by Ar and Kr atoms

  • Vítězslav Král


The numerical studies of the dynamics of the crystaline lattice formed by atoms requires the detailed knowledge of the forces between these atoms. In our contribution we concentrate on molecular dynamics study of sputtering of Al cluster in the form of the cube (i.e. eight Al atoms). The sputtering is due to impact of Ar and Kr atoms of energy 550 eV. We compare the use of the potential between atoms either of Molière type or the embedded atom potential which has been proposed recently. For the choice of both potential the spectra of sputtered particles were calulated and the comparison was made.

Key words

molecular dynamics sputtering of atoms interatomic potential 


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Copyright information

© Institute of Physics, Academy of Sciences of Czech Republic 2005

Authors and Affiliations

  • Vítězslav Král
    • 1
  1. 1.Praha 4Czech Republic

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