Maskless wafer-level microfabrication of optical penetrating neural arrays out of soda-lime glass: Utah Optrode Array
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Borrowing from the wafer-level fabrication techniques of the Utah Electrode Array, an optical array capable of delivering light for neural optogenetic studies is presented in this paper: the Utah Optrode Array. Utah Optrode Arrays are micromachined out of sheet soda-lime-silica glass using standard backend processes of the semiconductor and microelectronics packaging industries such as precision diamond grinding and wet etching. 9 × 9 arrays with 1100μ m × 100μ m optrodes and a 500μ m back-plane are repeatably reproduced on 2i n wafers 169 arrays at a time. This paper describes the steps and some of the common errors of optrode fabrication.
KeywordsMicrofabrication Maskless Utah optrode Array (UOA) Optogenetics Neurophotonics MEMS
The majority of this work was self-funded by Mr. Ronnie Boutte, but he would like thank the Utah Science Technology and Research (USTAR) for providing seed funding under the Student-Oriented Project initiative for the Virtual CAD/CAM work for 404 a Tunable UOA. Dr. Steve Blair would like to thank the NSF for ancillary support provided under grant 1310654.
- T. Abaya, S. Blair, P. Tathireddy, L. Rieth, F. Solzbacher, A 3d glass optrode array for optical neural stimulation. Biomed. Opt. Express. 3(12), 3087 (2012a). doi: 10.1364/boe.3.003087
- H. Ayaz, P.A. Shewokis, S. Bunce, B. Onaral, in An optical brain computer interface for environmental control. 2011 Annual International Conference of the IEEE Engineering in Medicine and Biology Society, Institute of Electrical & Electronics Engineers (IEEE), (2011), doi: 10.1109/iembs.2011.6091561
- R. Berry, M. Getzin, L. Gjesteby, G. Wang, in X-Optogenetics and U-Optogenetics: Feasibility and Possibilities. Photonics, Multidisciplinary Digital Publishing Institute, Vol. 2, (2015), pp. 23–39Google Scholar
- R.W. Boutte, M. Bijanzadeh, A. Cutrone, F. Federer, S. Johnson, S. Merlin, L. Nurminen, S. Blair, A. Angelucci, in Nonhuman primate visual cortex damage assessment of in vivo laser illumination and implanted 13X13 Utah Optrode array. in Neural Engineering Research Group Presentation (University of Utah, 2013)Google Scholar
- N.G. Laxpati, B. Mahmoudi, C.A. Gutekunst, J.P. Newman, R. Zeller-Townson, R.E. Gross, Real-time in vivo optogenetic neuromodulation and multielectrode electrophysiologic recording with neurorighter. Front. Neuroeng. 7 (2014). doi: 10.3389/fneng.2014.00040
- Lowes, Gardner glass products 3/32-in x 12-in x 10-in clear replacement glass for windows, cabinets, and picture frames. http://www.lowes.com/pd/Gardner-Glass-Products-3-32-in-x-12-in-x-10-in-Clear-Replacement-Glass-for-Windows-Cabinets-and-Picture-Frames/3121139, accessed: 2016-10-09 (2016)
- Method of the year. Nat. Methods. 8(1), 1–1 (2010). doi: 10.1038/nmeth.f.321
- Thorlabs, Implantable fiber optic cannulae (2016)Google Scholar
- V.P. Glass, Sodalime glass: Internal transmittance [ 2m m] accessed: 2016-10-09 (2016)Google Scholar
- F. Wu, E. Stark, M. Im, I.J. Cho, E.S. Yoon, G. Buzsáki, K.D. Wise, E. Yoon, An implantable neural probe with monolithically integrated dielectric waveguide and recording electrodes for optogenetics applications. J. Neural. Eng. 10(5), 056,012 (2013). doi: 10.1088/1741-2560/10/5/056012 CrossRefGoogle Scholar
- J. Zhang, F. Laiwalla, J.A. Kim, H. Urabe, R.V. Wagenen, Y.K. Song, B.W. Connors, F. Zhang, K. Deisseroth, A.V. Nurmikko, Integrated device for optical stimulation and spatiotemporal electrical recording of neural activity in light-sensitized brain tissue. J. Neural. Eng. 6(5), 055,007 (2009). doi: 10.1088/1741-2560/6/5/055007 CrossRefGoogle Scholar