Maskless wafer-level microfabrication of optical penetrating neural arrays out of soda-lime glass: Utah Optrode Array
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Borrowing from the wafer-level fabrication techniques of the Utah Electrode Array, an optical array capable of delivering light for neural optogenetic studies is presented in this paper: the Utah Optrode Array. Utah Optrode Arrays are micromachined out of sheet soda-lime-silica glass using standard backend processes of the semiconductor and microelectronics packaging industries such as precision diamond grinding and wet etching. 9 × 9 arrays with 1100μ m × 100μ m optrodes and a 500μ m back-plane are repeatably reproduced on 2i n wafers 169 arrays at a time. This paper describes the steps and some of the common errors of optrode fabrication.
KeywordsMicrofabrication Maskless Utah optrode Array (UOA) Optogenetics Neurophotonics MEMS
The majority of this work was self-funded by Mr. Ronnie Boutte, but he would like thank the Utah Science Technology and Research (USTAR) for providing seed funding under the Student-Oriented Project initiative for the Virtual CAD/CAM work for 404 a Tunable UOA. Dr. Steve Blair would like to thank the NSF for ancillary support provided under grant 1310654.
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