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Valveless impedance micropump with integrated magnetic diaphragm

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Abstract

This study presents a planar valveless impedance-based micropump for biomedical applications comprising a lower glass substrate patterned with a copper micro-coil, a microchannel, an upper glass cover plate, and a PDMS diaphragm with an electroplated magnet on its upper surface. When a current is passed through the micro-coil, an electromagnetic force is established between the coil and the magnet. The resulting deflection of the PDMS diaphragm creates an acoustic impedance mismatch within the microchannel, which in turn produces a net flow. The performance of the micropump is characterized experimentally. The experimental results show that a maximum diaphragm deflection of 30 μm is obtained when the micro-coil is supplied with an input current of 0.5 A. The corresponding flow rate is found to be 1.5 μl/sec when the PDMS membrane is driven by an actuating frequency of 240 Hz.

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References

  • S. Böhm, G.J. Burger, M.T. Korthorst, F. Roseboom, Sens. Actuators 80, 77–83 (2000)

    Article  Google Scholar 

  • A. Borzi, G. Propst, Math. Phys. 54, 1050–1072 (2003)

    MATH  MathSciNet  Google Scholar 

  • H.T. Chang, C.Y. Lee, C.Y. Wen, Microsyst. Technol. 13, 1615–1622 (2007)

    Article  Google Scholar 

  • H.P. Chou, M.A. Unger, S.R. Quake, Biomed. Microdevices 3, 323–330 (2001)

    Article  Google Scholar 

  • O. Cugat, G. Reyne, J. Delamare, H. Rostaing, Sens. Actuators, A 129, 265–269 (2006)

    Article  Google Scholar 

  • A. Hatch, A.E. Kamholz, G. Holman, P. Yager, K.F. Böhringer, J. Microelectromech. Syst. 10, 215–221 (2001)

    Article  Google Scholar 

  • L.S. Jang, W.H. Kan, Biomed. Microdevices 9, 619–626 (2007)

    Article  Google Scholar 

  • L.S. Jang, Y.J. Li, S.J. Lin, Y.C. Hsu, W.S. Yao, M.C. Tsai, C.C. Hou, Biomed. Microdevices 9, 185–194 (2007)

    Article  Google Scholar 

  • N.L. Jeon, D.T. Chiu, C.J. Wargo, H. Wu, I.S. Choi, J.R. Anderson, G.M. Whitesides, Biomed. Microdevices 4, 117–121 (2002)

    Article  Google Scholar 

  • M. Khoo, C. Liu, Sens. Actuators, A 89, 259–266 (2001)

    Article  Google Scholar 

  • L.K. Lagorce, O. Brand, M.G. Allen, J. Microelectromech. Syst. 8, 2–9 (1999)

    Article  Google Scholar 

  • C. Liu, T. Tsao, Y.C. Tai, C.M. Ho, in Proceedings of the IEEE Micro Electro Mechanical System (MEMS), ed. By T. Higuchi, K. Ikutu (IEEE, New Jersey, 1994), pp. 57–62

  • C. Liu, T. Tsao, G.B. Lee, J.T.S. Leu, Y.W. Yi, Y.C. Tai, C.M. Ho, Sens. Actuators 78, 190–197 (1999)

    Article  Google Scholar 

  • A. Manz, N. Graber, H.M. Widmer, Sens. Actuators, B 1, 244–248 (1990)

    Article  Google Scholar 

  • A.H. Meng, N.T. Nguyen, R.M. White, Biomed. Microdevices 2, 169–174 (2000)

    Article  Google Scholar 

  • N.T. Nguyen, X.Y. Huang, T.K. Chuan, J. Fluids Eng. 124, 384–392 (2002)

    Article  Google Scholar 

  • H.J. Sheen, C.J. Hsu, T.H. Wu, H.C. Chu, C.C. Chang, U. Lei, Sens. Actuators, A 139, 237–244 (2007)

    Article  Google Scholar 

  • H.T.G. Van Lintel, F.C.M. Van de Pol, S. Bouwstra, Sens. Actuators 15, 153–167 (1988)

    Article  Google Scholar 

  • C.Y. Wen, C.H. Cheng, C.N. Jian, T.A. Hguyen, C.Y. Hsu, Y.R. Su, Mat. Sci. Forum 505–507, 127–132 (2006)

    Article  Google Scholar 

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Acknowledgement

The authors would like to thank the financial support provided by the National Science Council in Taiwan (NSC 98-2221-E-020-030, NSC 97-3114-E-110-001) and the Ministry of Economic Affairs (98-EC-17-A-05-S2-0080) in Taiwan.

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Authors and Affiliations

  1. Department of Materials Engineering, National Pingtung University of Science and Technology, Pingtung, Taiwan, 912

    Chia-Yen Lee

  2. Department of Mechanical and Automation Engineering, Da-Yeh University, Changhua, Taiwan, 515

    Zgen-Hui Chen

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  1. Chia-Yen Lee
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  2. Zgen-Hui Chen
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Correspondence to Chia-Yen Lee.

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Lee, CY., Chen, ZH. Valveless impedance micropump with integrated magnetic diaphragm. Biomed Microdevices 12, 197–205 (2010). https://doi.org/10.1007/s10544-009-9375-8

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  • DOI: https://doi.org/10.1007/s10544-009-9375-8

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