Abstract
The electric admittance of a compound system composed of a thicknessshear mode (TSM) quartz crystal resonator (QCR) and an array of surface viscoelastic micro-beams (MBs) is studied. The governing equations of the MBs are derived from the Timoshenko-beam theory in consideration of shear deformation. The electrical admittance is described directly in terms of the physical properties of the surface epoxy resin (SU-8) MBs from an electrically forced vibration analysis. It is found that both the inertia effect and the constraint effect of the MBs produce competitive influence on the resonant frequency and admittance of the compound QCR system. By further comparing the numerical results calculated from the Timoshenko-beam model with those from the Euler-beam model, the shear deformation is found to lead to some deviation of an admittance spectrum. The deviations are revealed to be evident around the admittance peak(s) and reach the maximum when a natural frequency of the MBs is identical to the fundamental frequency of the QCR. Besides, a higher order vibration mode of the MBs corresponds to a larger deviation at the resonance.
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References
Benes, E, Improved quartz crystal microbalance technique. Improved quartz crystal microbalance technique 56, 608–626 (1984)
Li, F., Wang, J. H. C., and Wang, Q. M, Thickness shear mode acoustic wave sensors for characterizing the viscoelastic properties of cell monolayer. Thickness shear mode acoustic wave sensors for characterizing the viscoelastic properties of cell monolayer 128, 399–406 (2008)
Li, N., Qian, Z., and Yang, J, Effects of nonlinearity on transient processes in AT-cut quartz thickness-shear resonators. Effects of nonlinearity on transient processes in AT-cut quartz thickness-shear resonators 28, 347–352 (2015)
Reed, C. E., Kanazawa, K. K., and Kaufman, J. H, Physical description of a viscoelastically loaded AT-cut quartz resonator. Physical description of a viscoelastically loaded AT-cut quartz resonator 68, 1993–2001 (1990)
Sauerbrey, G, Verwendung von Schwingquarzen zur Wägung dunner Schichten und zur Mikrowägung. Verwendung von Schwingquarzen zur Wägung dunner Schichten und zur Mikrowägung 155, 206–222 (1959)
Liu, N., Yang, J. M., and Wang, J, Shear vibration of a crystal plate carrying an array of microbeams. Shear vibration of a crystal plate carrying an array of microbeams 91, 572–581 (2011)
Zhang, R. Y., Xie, J., Hu, Y. T., and Chen, X. D, Thickness-shear vibration of an elastic plate carrying an array of rigid microbeams with consideration of couple stresses. Thickness-shear vibration of an elastic plate carrying an array of rigid microbeams with consideration of couple stresses 51, 179–189 (2012)
Kong, L. C., Xie, X., Zhang, J., Wang, Y. X., and Hu, Y. T, On the interaction between a quartz crystal resonator and an array of micro-beams in thickness-shear vibrations. On the interaction between a quartz crystal resonator and an array of micro-beams in thickness-shear vibrations 28, 464–470 (2015)
Kong, L. C., Hu, H., and Hu, Y. T, Effect of shear deformation on frequency shift of a microbeams/ resonator system under thickness-shear vibrations (in Chinese). Effect of shear deformation on frequency shift of a microbeams/ resonator system under thickness-shear vibrations (in Chinese) 33, 75–78 (2014)
Kong, L. C. and Hu, Y. T, Effect of strain-gradients of surface micro-beams on frequency-shift of a quartz crystal resonator under thickness-shear vibrations. Effect of strain-gradients of surface micro-beams on frequency-shift of a quartz crystal resonator under thickness-shear vibrations 31, 647–652 (2015)
Xie, X., Kong, L. C., Wang, Y. X., Zhang, J., and Hu, Y. T, Coupled vibrations and frequency shift of compound system consisting of quartz crystal resonator in thickness-shear motions and micro-beam array immersed in liquid. Coupled vibrations and frequency shift of compound system consisting of quartz crystal resonator in thickness-shear motions and micro-beam array immersed in liquid 36(2), 225–232 (2015) DOI 10.1007/s10483-015-1902-7
Geim, A. K., Dubonos, S. V., Grigorieva, I. V., Novoselov, K. S., Zhukov, A. A., and Shapoval, S. Y, Microfabricated adhesive mimicking gecko foot-hair. Microfabricated adhesive mimicking gecko foot-hair 2, 461–463 (2003)
Nomura, S., Kojima, H., Ohyabu, Y., Kuwabara, K., Miyauchi, A., and Uemura, T, Cell culture on nanopillar sheet: study of HeLa cells on nanopillar sheet. Cell culture on nanopillar sheet: study of HeLa cells on nanopillar sheet 44, L1184–L1186 (2005)
McAllister, D. V., Wang, P. M., Davis, S. P., Park, J. H., Canatella, P. J., Allen, M. G., and Prausnitz, M. R, Microfabricated needles for transdermal delivery of macromolecules and nanoparticles: fabrication methods and transport studies. Microfabricated needles for transdermal delivery of macromolecules and nanoparticles: fabrication methods and transport studies 100, 13755–13760 (2003)
Hossenlopp, J., Jiang, L., Cernosek, R., and Josse, F, Characterization of epoxy resin (SU-8) film using thickness-shear mode (TSM) resonator under various conditions. Characterization of epoxy resin (SU-8) film using thickness-shear mode (TSM) resonator under various conditions 42, 2373–2384 (2004)
Liu, J., Cai, B., Zhu, J., Ding, G., Zhao, X., Yang, C., and Chen, D, Process research of high aspect ratio microstructure using SU-8 resist. Process research of high aspect ratio microstructure using SU-8 resist 10, 265–268 (2004)
Timoshenko, S. P. LXVI, On the correction for shear of the differential equation for transverse vibrations of prismatic bars. On the correction for shear of the differential equation for transverse vibrations of prismatic bars 41, 744–746 (1921)
Tiersten, H. F. Linear Piezoelectric Plate Vibrations, Springer, Boston (1969)
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Project supported by the National Natural Science Foundation of China (Nos. 11272127 and 51435006) and the Research Fund for the Doctoral Program of Higher Education of China (No. 20130142110022)
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Xie, J., Hu, Y. Electric admittance analysis of quartz crystal resonator in thickness-shear mode induced by array of surface viscoelastic micro-beams. Appl. Math. Mech.-Engl. Ed. 38, 29–38 (2017). https://doi.org/10.1007/s10483-017-2154-6
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DOI: https://doi.org/10.1007/s10483-017-2154-6