Abstract
The governing differential equation of micro/nanbeams with atom/molecule adsorption is derived in the presence of surface effects using the nonlocal elasticity. The effects of the nonlocal parameter, the adsorption density, and the surface parameter on the resonant frequency of the micro/nanobeams are investigated. It is found that, in addition to the nonlocal parameter and the surface parameter, the bending rigidity and the adsorption-induced mass exhibit different behaviors with the increase in the adsorption density depending on the adatom category and the substrate material.
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Communicated by Zhu-feng YUE
Project supported by the National Basic Research Program of China (No. 2011CB610300), the 111 Project of China (No. B07050), the National Natural Science Foundation of China (Nos. 10972182, 11172239, and 10902089), the Doctoral Program Foundation of Education Ministry of China (No. 20106102110019), the Open Foundation of State Key Laboratory of Structural Analysis of Industrial Equipment of China (No.GZ0802), and the Doctorate Foundation of Northwestern Polytechnical University of China (No.CX201111)
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Xu, Xj., Deng, Zc. Surface effects of adsorption-induced resonance analysis on micro/nanobeams via nonlocal elasticity. Appl. Math. Mech.-Engl. Ed. 34, 37–44 (2013). https://doi.org/10.1007/s10483-013-1651-9
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DOI: https://doi.org/10.1007/s10483-013-1651-9
Key words
- micro- and nano-electromechanical system(MEMS/NEMS) sensor
- nonlocal elasticity
- surface effect
- vibration
- atom/molecule adsorption