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Micromechanics of substrate-supported thin films

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Abstract

The mechanical properties of metallic thin films deposited on a substrate play a crucial role in the performance of micro/nano-electromechanical systems (MEMS/NEMS) and flexible electronics. This article reviews ongoing study on the mechanics of substrate-supported thin films, with emphasis on the experimental characterization techniques, such as the rule of mixture and X-ray tensile testing. In particular, the determination of interfacial adhesion energy, film deformation, elastic properties and Bauschinger effect are discussed.

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Acknowledgements

This work was supported by the National Natural Science Foundation of China (Grants 11472186 and 11602083) and the Natural Science Foundation of Hunan Province, China (Grant 2016JJ6044).

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  1. Wei He and Meidong Han have contributed to the article equally.

Authors and Affiliations

  1. Department of Mechanics, Tianjin University, Tianjin, 300072, China

    Wei He, Meidong Han, Shibin Wang & Lin-An Li

  2. Department of Engineering Mechanics, Hunan University of Science and Technology, Xiangtan, 411201, China

    Xiuli Xue

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He, W., Han, M., Wang, S. et al. Micromechanics of substrate-supported thin films. Acta Mech. Sin. 34, 381–391 (2018). https://doi.org/10.1007/s10409-017-0697-0

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