Abstract
In this paper, a mathematical model is presented for studying thin film damping of the surrounding fluid in an in-plane oscillating micro-beam resonator. The proposed model for this study is made up of a clamped-clamped micro-beam bound between two fixed layers. The micro-gap between the micro-beam and fixed layers is filled with air. As classical theories are not properly capable of predicting the size dependence behaviors of the micro-beam, and also behavior of micro-scale fluid media, hence in the presented model, equation of motion governing longitudinal displacement of the micro-beam has been extracted based on non-local elasticity theory. Furthermore, the fluid field has been modeled based on micro-polar theory. These coupled equations have been simplified using Newton-Laplace and continuity equations. After transforming to non-dimensional form and linearizing, the equations have been discretized and solved simultaneously using a Galerkin-based reduced order model. Considering slip boundary conditions and applying a complex frequency approach, the equivalent damping ratio and quality factor of the micro-beam resonator have been obtained. The obtained values for the quality factor have been compared to those based on classical theories. We have shown that applying non-classical theories underestimate the values of the quality factor obtained based on classical theories. The effects of geometrical parameters of the micro-beam and micro-scale fluid field on the quality factor of the resonator have also been investigated.
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Nguyen, C.T.C.: Vibrating RF MEMS for next generation wireless applications, Proceedings of the Custom Integrated Circuits Conference, Orlando, FL, 3–6 October. IEEE, Piscataway (2004)
Maali, A., Hurth, C., Boisgard, R., et al.: Hydrodynamics of oscillating atomic force microscopy cantilevers in viscous fluids. J. Appl. Phys. 97, 074907 (2005). doi:10.11063/1.1873060
Rezazadeh, G., Ghanbari, M., Mirzaee, I., et al.: On the modeling of a piezoelectrically actuated microsensor for simultaneous measurement of fluids viscosity and density. Measurement 43, 1516–1524 (2010). doi:10.1016/j.measurement.2010.08.022
Vahdat, A.S., Rezazadeh, G.: Effects of axial and residual stresses on thermo elastic damping in capacitive micro-beam resonator. J. Franklin Inst. 348, 622–639 (2011). doi:10.1007/s00707-012-0622-3
Wang, C.Y.: The squeezing of a fluid between two plates. ASME J. Appl. Mech. 43, 579–582 (1976). doi:10.1115/1.3423935
Nayfeh, H., Younis, M.I.: A new approach to the modeling and simulation of flexible microstructures under the effect of squeeze-film damping. J. Micromech. Microeng. 14, 170–181 (2004). doi:10.1088/0960-1317/14/2/002
Hashimoto, H.: Viscoelastic squeeze film characteristics with inertia effects between two parallel circular plates under sinusoidal motion. ASME J. Tribol. 116, 110–117 (1994). doi:10.1115/1.2927034
Newell, W.E.: Miniaturization of tuning forks. Science 161, 1320–1326 (1968)
Zook, J.D., Burns, D.W., Guckel, H., et al.: Characteristics of polysilicon resonant microbeams. Sens. Actuators 35, 290–294 (1992)
Legtenberg, R., Tilmans, H.A.: Electrostatically driven vacuum-encapsulated polysilicon resonators. Sens. Actuators 45, 57–66 (1994). doi:10.1016/0924-4247(94)00812-4
Starr, J. B.: Squeeze-film damping in solid-state accelerometers. in Proceeding. IEEE Solid-State Sens. Actuators Workshop, 44–47 (1994)
Yang, Y. J., Gretillat, M. A., Senturia, S. D.: Effect of air damping on the dynamics of nonuniform deformations of microstructures. IEEE. International conference of solid state sens. Actuators, 1093–1096 (1997)
Hung, E.S., Senturia, S.D.: Generating efficient dynamical models for microelectromechanical systems from a few finite-element simulations runs. JMEMS 8, 280–289 (1999). doi:10.1109/84.788632
Pandey, A.K., Pratap, R.: Effect of flexural modes on squeeze film damping in MEMS cantilever resonators. J. Micromech. Microeng. 17, 2475–2484 (2007). doi:10.1088/0960-1317/17/12/013
Younis, M.I., Nayfeh, A.H.: Simulation of squeeze-film damping of microplates actuated by large electrostatic load. ASME. J. Comput. Nonlinear Dynam. 2, 101–112 (2007). doi:10.1115/1.2727491
Chatrejee, S., Pohit, G.: A large deflection model for the pull-in analysis of electrostatically actuated micro cantilever beams. J. Sound Vib. 322, 2008 (2009). doi:10.1016/j.jsv.2008.11.046
Chatrejee, S., Pohit, G.: Squeeze- film characteristics of cantilever micro-resonators for higher modes of flexural vibration. Int. J. Eng. Sci. Technol. 2, 187–199 (2010)
Khatami, F., Rezazadeh, G.: Dynamic response of a torsional micromirror to electrostatic force and mechanical shock. Microsyst. Technol. 15, 535–545 (2009). doi:10.1007/s00542-008-0738-5
Feng, C., Zhao, Y.P., Liu, D.Q.: Squeeze film effect in MEMS devices with perforated plates for small amplitude vibration. Microsyst. Technol. 13, 625–633 (2007). doi:10.1007/s00542-006-0285-x
Fleck, N.A., Muller, G.M., Ashby, M.F.: Strain gradient plasticity: theory and experiment. J. Acta Metall. Mater. 42, 475–487 (1992). doi:10.1016/0956-7151(94)90502-9
Stolken, J.S., Evans, A.G.: A microbend test method for measuring the plasticity length scale. J. Acta Mater. 46, 109–5115 (1998). doi:10.1016/S1359-6454(98)00153-0
McFarland, A.W., Colton, J.S.: Role of material microstructure in plate stiffness With relevance to microcantilever sensors. J. Micromech. Microeng. 15, 1060–1067 (2005). doi:10.1088/0960-1317/15/5/024
Kong, Sh, Zhou, Sh, Zhifeng, N., et al.: The size-dependent natural frequency of Bernoulli-Euler micro-beams. J. Eng. Sci. 46, 427–437 (2008). doi:10.1016/j.ijengsci.2007.10.002
Fathalilou, M., Sadeghi, M., Rezazadeh, G.: Nonlinear behavior of capacitive micro-beams based on strain gradient theory. J. Mech. Sci. Technol. 28, 1141–1151 (2014). doi:10.1007/s12206-014-0102-x
Fathalilou, M., Sadeghi, M., Rezazadeh, G.: Bifurcation analysis of a capacitive Micro-resonator considering non-local elasticity theory. Int. J. Nonlinear Sci. Num. Simul. 15, 241–249 (2014). doi:10.1515/ijnsns-2013-0111
Fathalilou, M., Sadeghi, M., Rezazadeh, G.: Micro-inertia effects on the dynamic characteristics of micro-beams considering couple stress theory. Mech. Res. Commun. 60, 74–80 (2014). doi:10.1016/j.mechrescom.2014.06.003
Blech, J.J.: On isothermal squeeze films. J. Tribol. 105, 615–620 (1983). doi:10.1115/1.3254692
Veijola, T.: Compact models for squeezed-film dampers with inertial and rarefied gas effects. J. Micromech. Microeng. 14, 1109–1118 (2004). doi:10.1088/0960-1317/14/7/034
Ye, W., Wang, X., Hemmert, W., et al.: Air damping in lateral oscillating micro-resonators: a numerical and experimental Study. JMEMS 12, 557–566 (2003). doi:10.1109/JMEMS.2003.817895
Kucaba-Pietal, A.: Microchannels flow modelling with the micropolar fluid theory. Bull. Pol. Acad. Sci. 52, 209–213 (2004)
Eringen, A.C.: Theory of micro-polar fluids. J. Appl. Math. Mech. 16, 1–18 (1966)
Kucaba-Pietal, A.: Applicability of the micropolar fluid theory in solving microfluidics problems. Proceedings 1st European Conference on Microfluidics, Bologna (2008)
Chen, J., Liang, C., Lee, J.D.: Theory and simulation of micropolar fluid dynamics. J. Nanoeng. Nanosyst. 224, 31–39 (2011). doi:10.1177/1740349911400132
Deo, S., Shukla, P.: Creeping flow of micro-polar fluid past a fluid sphere with non-zero spin boundary conditions. Int. J. Eng. Technol. 2, 67–76 (2010). doi:10.14419/ijet.vil2.5
Eringen, A.C.: Linear theory of nonlocal elasticity and dispersion of plane waves. Int. J. Eng. Sci. 10, 425–435 (1972)
Papautskya, I., Brazzlea, J., Ameelb, T., et al.: Laminar fluid behavior in microchannels using micropolar fluid theory. Sens. Actuators 73, 101–108 (1999). doi:10.1016/S0924-4247(98)00261-1
Hutcherson, S. M.: Theoretical and Numerical Studies of the Air Damping of Micro-Resonators in the Non-Continuum Regime. Ph.D thesis, G. W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology (2004)
Hirschfelder, J. O., Curtis, C. F., Bird, R. B.: Molecular Theory of Gases and Liquids, Wiley, NewYork, corrected printing, chapters 5 and 11 (1964)
Veijola, T., Turowski, M.: Compact damping models for laterally moving microstructures with gas-rarefaction effects. JMEM 10, 263–272 (2001). doi:10.1109/84.925777
Eringen, A.C.: Theory of thermo micro-polar fluids. J. Math. Anal. Appl. 38, 480–496 (1972)
Ahmadi, G.: Self-similar solution of incompressible micro-polar boundary layer flow over a semi-infinite plate. Int. J. Eng. Sci. 14, 639–646 (1976)
Asghari, M., Ahmadian, M.T., Kahrobaiyan, M.H., Rahaeifard, M.: On the size-dependent behavior of functionally graded micro-beams. Mater. Des. 31, 2324–2329 (2010). doi:10.1016/j.matdes.2009.12.006
Asghari, M., Rahaeifard, M., Kahrobaiyan, M.H., Ahmadian, M.T.: The modified couple stress functionally graded Timoshenko beam formulation. Mater. Des. 32, 1435–1444 (2011). doi:10.1016/j.matdes.2010.08.046
Gad-el-Hak.: The MEMS Handbook. CRC Press, Boca Raton, Florida (2002)
Wang, F.C., Zhao, Y.P.: Slip boundary conditions based on molecular kinetic theory. The critical shear stress and the energy dissipation at the liquid-solid interface. Soft Matter 18, 8628–8634 (2011). doi:10.1039/C1SM05543G
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Ghanbari, M., Hossainpour, S. & Rezazadeh, G. Studying thin film damping in a micro-beam resonator based on non-classical theories. Acta Mech. Sin. 32, 369–379 (2016). https://doi.org/10.1007/s10409-015-0482-x
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DOI: https://doi.org/10.1007/s10409-015-0482-x