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Journal of Material Cycles and Waste Management

, Volume 20, Issue 1, pp 375–385 | Cite as

A study on recovery of SiC from silicon wafer cutting slurry

  • Wei-Hao Lee
  • Chih-Wei Hsu
  • Yung-Chin Ding
  • Ta-Wui Cheng
ORIGINAL ARTICLE
  • 184 Downloads

Abstract

The objective of this study is to recover SiC from silicon wafer cutting slurry using physical separation and acid/alkali purification processes. Hydrocyclone was used in the first-stage process to recover SiC and Si from silicon wafer cutting slurry. Through hydrocyclone separation, the SiC content and recovery of can reach 98 and 88%, respectively. In acid and alkali purification processes, the iron and silicon can be removed and further increase the SiC content up to 99.5%. From the test results obtained in this study, it is believed that the recycling and reutilization of SiC from silicon wafer cutting slurry can be highly feasible and economical.

Keywords

SiC Wafer Cutting slurry Hydrocyclone 

References

  1. 1.
    Sopori B, Devayajanam S, Shet S, Guhabiswas D, Basnyat P, Moutinho H, Gedvilas L, Jones K, Binns J, Appel J (2013) Characterizing damage on si wafer surfaces cut by slurry and diamond wire sawing. In: photovoltaic specialists conference (PVSC). 2013 IEEE 39th, Tampa, FL, pp 945–950Google Scholar
  2. 2.
    Nishijima S, Izumi Y, Takeda SI, Suemoto H, Nakahira A, Horie SI (2003) Recycling of abrasives from wasted slurry by superconducting magnetic separation. IEEE Trans Appl Supercon 13:1596–1599CrossRefGoogle Scholar
  3. 3.
    Shibata J, Murayama N, Nagae K (2006) Flotation separation of SiC from wastes in the silicon wafer slicing process. Kagaku Kogaku Ronbun 32:93–98CrossRefGoogle Scholar
  4. 4.
    Wang TY, Lin YC, Tai CY, Sivakumar R, Rai DK, Lan CW (2008) A novel approach for recycling of kerf loss silicon from cutting slurry waste for solar cell applications. J Cryst Growth 310:3403–3406CrossRefGoogle Scholar
  5. 5.
    Tsai TH (2009) Pretreatment of recycling wiresaw slurries-Iron removal using acid treatment and electrokinetic separation. Sep Purif Technol 68:24–29CrossRefGoogle Scholar
  6. 6.
    Wu YF, Chen YM (2009) Separation of silicon and silicon carbide using an electrical field. Sep Purif Technol 68:70–74CrossRefGoogle Scholar
  7. 7.
    Lan CW, Lin YC, Wang TY, Tai YD (2010) Recovery method of silicon slurry. US Patent No. 2010/0215561Google Scholar
  8. 8.
    Lin YC, Wang TY, Lan CW, Tai CY (2010) Recovery of silicon powder from kerf loss slurry by centrifugation. Powder Technol 200:216–223CrossRefGoogle Scholar
  9. 9.
    Hariharan AV, Ravi J, (2010) Method to convert silicon powder to high purity polysilicon through intermediate SiF4. US Patent No. 2010/0061911Google Scholar
  10. 10.
    Wang YX, Jiang C, Liang HY (2012) Recovery and separation of Si and SiC in wire cutting waste slurry from photovoltaic silicon. Key Eng Mat 512–515:1541–1544CrossRefGoogle Scholar
  11. 11.
    Tsai TH, Shih YP, Wu YF (2013) Recycling silicon wire-saw slurries: separation of silicon and silicon carbide in a ramp settling tank under an applied electrical field. J Air Waste Manage Assoc 63:521–527CrossRefGoogle Scholar
  12. 12.
    Sergii AS, Boris VP, Vladimir BD (2014) Silicon and silicon carbide powders recycling technology from wire-saw cutting waste in slicing process of silicon ingots. Sep Purif Technol 133:16–21CrossRefGoogle Scholar
  13. 13.
    Yang CF, Hsu HP, Lan CW (2015) A rapid thermal process for silicon recycle and refining from cutting kerfloss slurry waste. Sep Purif Technol 149:38–46CrossRefGoogle Scholar
  14. 14.
    Yang SF, Hwang CS, Jhuang Shie ZY, Tsai CH, Chang CL, Huang TJ (2015) Development of recovery system for extracting silicon carbide from photovoltaic industry abrasive slurry. Key Eng Mater 656–657:28–32CrossRefGoogle Scholar
  15. 15.
    Ghodrat M, Kuang SB, Yu AB, Vince A, Barnett GD, Barnett PJ (2014) Numerical analysis of hydrocyclones with different conical section designs. Miner Eng 62:74–84CrossRefGoogle Scholar
  16. 16.
    Kanchana S, Annop N, Warinthorn S (2009) Enhancement of tapioca starch separation with a hydrocyclone: effects of apex diameter, feed concentration, and pressure drop on tapioca starch separation with a hydrocyclone. Chem Eng Process 48:195–202CrossRefGoogle Scholar
  17. 17.
    Wang JM, Wang LZ (2009) Experimental study of a new hydrocyclone for multi-density particles separation. Sep Sci Technol 44:2915–2927CrossRefGoogle Scholar
  18. 18.
    Karabelas AJ (1976) Particle attrition in shear flow of concentrated slurries. AICHE J 22:765–771CrossRefGoogle Scholar
  19. 19.
    Marino MA, Brica RM, Neale CN, (1997) Heavy metal soil remediation: the effects of attrition scrubbing on a wet gravity concentration process. Environ Prog 16: 208–214CrossRefGoogle Scholar
  20. 20.
    Bayley RW, Biggs CA (2005) Characterisation of an attrition scrubber for the removal of high molecular weight contaminants in sand. Chem Eng J 111:71–79CrossRefGoogle Scholar
  21. 21.
    Pétavy F, Ruban V, Conil P (2009) Treatment of stormwater sediments: efficiency of an attrition scrubber—laboratory and pilot-scale studies. Chem Eng J 145:475–482CrossRefGoogle Scholar

Copyright information

© Springer Japan 2017

Authors and Affiliations

  • Wei-Hao Lee
    • 1
  • Chih-Wei Hsu
    • 2
  • Yung-Chin Ding
    • 1
  • Ta-Wui Cheng
    • 1
  1. 1.Institute of Mineral Resources EngineeringNational Taipei University of TechnologyTaipeiTaiwan, Republic of China
  2. 2.GlobalWafers Co., Ltd.HsinchuTaiwan, Republic of China

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