In this paper, a new switching beam design method is proposed. By using a beam design method to design a beam, an ultra-wideband radio-frequency micro electromechanical system (RF MEMS) switch with a frequency band of 1–110 GHz is designed. With this design method, in addition to using the equivalent capacitance between the switch beam and the signal line, you can also make full use of the fringe field effect between them. Therefore, it can greatly increase the capacitance ratio between the two states of the switch up and down. Finally, it achieves the purpose of extending the working bandwidth of the switch. In the up state, the return loss is less than 20 dB and the bandwidth is greater than 100 GHz. The insertion loss is less than 0.2 dB. The bandwidth is greater than 100 GHz. In the down state, the isolation is less than 10 dB and the bandwidth is greater than 90 GHz.
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The author sincerely thanks to the Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, and the computer and other equipment provided by the School of Instrument and Electronics (North University of China). Funded by the National Natural Science Foundation of China (No. U1637212); National Defense Pre-research Foundation of China (61404130402); Fund for Shanxi “1331 Project” Key Subject Construction; Fund for Key Laboratory (61428050104). Supported by Scientific and Technological Innovation Programs of Higher Education Institutions in Shanxi.
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Qin, R., Zhang, B., Lei, C. et al. A novel switch beam design method with extending switching radio-frequency bandwidth. Microsyst Technol 27, 315–324 (2021). https://doi.org/10.1007/s00542-020-04956-w