A review of MEMS inertial switches

Abstract

A microelectromechanical system (MEMS) inertial switch is both a sensor and an actuator by only capturing a threshold and a close/open timestamp, yielding unique benefits like lower power consumption, lower costs, small size and large volume production. A comprehensive survey of the design schemes, performance aspects and dynamic test methods of the MEMS inertial switches is provided. Different reported varieties and design schemes of the switch have been reviewed emphasizing on directional sensitivity, acceleration threshold sensitivity, mechanism of contact-enhancement, and their advantages and disadvantages. Further, the dynamic test methods to provide feedback to the design-and-simulation process, including electrical method and optical methods, have been compared and discussed. In the end, a main summary and outlook about the MEMS inertial switches has been provided to aid in the development of the future research in this field.

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Fig. 1
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Reproduced from (Gerson et al. 2014)

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Reproduced from (Greywall 2007)

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Reproduced from (Currano et al. 2013)

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Reproduced from (Chen et al. 2014a)

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Reproduced from (Cao et al. 2015)

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Reproduced from (Chen and Yang 2007)

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Reproduced from (Zhang et al. 2017b)

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Reproduced from (Tønnesen et al. 1997; Noetzel et al. 1996)

Fig. 11

Reproduced from (Cai et al. 2008a)

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Reproduced from (Cai et al. 2008a)

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Reproduced from (Deng et al. 2013)

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Reproduced from (Xi et al. 2014)

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Reproduced from (Xi et al. 2014)

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Reproduced from (Lee et al. 2012)

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Reproduced from (Lee et al. 2012)

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Reproduced from (Yang et al. 2012)

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Reproduced from (Matsunaga and Esashi 2002)

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Reproduced from (Matsunaga and Esashi 2002)

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Reproduced from (Jia et al. 2007)

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Reproduced from (Zhao et al. 2007)

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Reproduced from (Rembe et al. 2001c)

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Reproduced from (Lawrence and Rembe 2003)

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Reproduced from (Rembe et al. 2001a)

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Reproduced from (Currano et al. 2010)

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Reproduced from (Cao et al. 2017)

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Acknowledgements

This work was supported in part by the National Natural Science Foundation of China (no. 51805268); China Postdoctoral Science Foundation (no. 2017M621745).

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Cao, Y., Xi, Z. A review of MEMS inertial switches. Microsyst Technol 25, 4405–4425 (2019). https://doi.org/10.1007/s00542-019-04393-4

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