Abstract
Design and fabrication of an in-plane silicon Fabry–Perot temperature sensor for fiber-optic temperature sensing was reported in our previous work. To fabricate this sensor, deep reactive ion etching process was utilized which is challenging due to the large depth of etching needed for the device. Required optically smooth surfaces and highly vertical sidewalls as well as minimum amount of under-etch are difficult to be achieved in deep-etched structures. Here, the fabrication errors are briefly introduced and thereafter a numerical analysis based on the transfer-matrix formulation for propagation of Gaussian beams across the proposed silicon Fabry–Perot resonator is developed. Finally, the fabricated sensor is modeled and the device performance degradation due to fabrication imperfections is estimated.
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References
Addae-Mensah K, Retterer S, Opalenik S et al (2010) Cryogenic etching of silicon: an alternative method for fabrication of vertical microcantilever master molds. J Microelectromech Syst 19:64–74
Azimi S, Mehran M, Amini A et al (2010) Formation of three-dimensional and nanowall structures on silicon using a hydrogen-assisted high aspect ratio etching. J Vac Sci Technol B 28(6):1125–1131
Beheim G, Sotomayor J, Tuma M (1993) Laser-annealed thin-film fiber-optic temperature sensor. Proc SPIE 2045:217–221
Berthold JW, Reed SE, Sarkis RG (1991) Reflective fiber optic temperature sensor using silicon thin film. Opt Eng 30(5):524–528
Breglio G, Coppola G, Cutolo A et al (2001) Temperature optical sensor based on a silicon bi-modal Y branch. Proc SPIE 4293:155–161
Chang C, Solgaard O (2013) Fano resonances in integrated silicon Bragg reflectors for sensing applications. Opt Express 21(22):27209–27218
Cocorullo G, Della Corte F, Iodice M et al (1997) A temperature all-silicon micro-sensor based on the thermo-optic effect. IEEE Trans Electron Devices 44(5):766–774
Deng Q, Li X, Chen R et al (2014) Low-cost silicon photonic temperature sensor using broadband light source. In: IEEE 11th international conference on group IV photonics (GFP). https://doi.org/10.1109/Group4.2014.6962033
Gharooni M, Mohajerzadeh A, Sandoughsaz A et al (2013) A novel non-sequential hydrogen-pulsed deep reactive ion etching of silicon. J Micromech Microeng 23(9):095014
Guan X, Wang X, Frandsen L (2016) Optical temperature sensor with enhanced sensitivity by employing hybrid waveguides in a silicon Mach-Zehnder interferometer. Opt Express 24(15):16349–16356
Irace A, Breglio G (2003) All-silicon optical temperature sensor based on multi-mode interference. Opt Express 11(22):2807–2812
Jung I, Park B, Provine J et al (2009) Photonic crystal fiber tip sensor for precision temperature sensing. In: IEEE LEOS annual meeting conference. https://doi.org/10.1109/LEOS.2009.5343346
Jung I, Park B, Provine J et al (2011) Highly sensitive monolithic silicon photonic crystal fiber tip sensor for simultaneous measurement of refractive index and temperature. J Lightwave Technol 29(9):1367–1374
Kim H, Yu M (2016) Cascaded ring resonator-based temperature sensor with simultaneously enhanced sensitivity and range. Opt Express 24(9):9501–9510
Kim G, Lee H, Park C et al (2010) Silicon photonic temperature sensor employing a ring resonator manufactured using a standard CMOS process. Opt Express 18(21):22215–22221
Klimov N, Berger M, Ahmed Z (2015a) Towards reproducible ring resonator based temperature sensors. Sens Transducers J 191(8):63–66
Klimov N, Mittal S, Berger M et al (2015b) On-chip silicon waveguide Bragg grating photonic temperature sensor. Opt Lett 40(17):3934–3936
Klimov N, Purdy T, Ahmed Z (2015) Fabry-Perrot cavity-based silicon photonic thermometers with ultra-small footprint and high sensitivity. Adv Photonics. https://doi.org/10.1364/SENSORS.2015.SeT4C.4
Laermer F, Schilp A (1996) Method of anisotropically etching silicon. US Patent 26(3):5501893
Lee H, Kim G, Kim W et al (2011) Tunable-Resonator-Based Temperature Sensor Interrogated through Optical Power Detection. Appl Phys Express 4(10):102201
Lipson A, Yeatman EM (2007a) A 1-D photonic band gap tunable optical filter in (110) silicon. J Microelectromech Syst 16(3):521–527
Lipson A, Yeatman EM (2007b) Low-loss one-dimensional photonic band gap filter in (110) silicon. Opt Lett 31(3):395–397
Liu G, Han M, Hou W (2015) High-resolution and fast-response fiber-optic temperature sensor using silicon Fabry–Perot cavity. Opt Express 23(6):7237–7247
Park B, Jung I, Provine J et al (2010) Monolithic silicon photonic crystal fiber tip sensor for refractive index and temperature sensing. In: IEEE conference on lasers and electro-optics and quantum electronics and laser science. https://doi.org/10.1364/CLEO.2010.CThB1
Park B, Provine J, Jung I et al (2011) Photonic crystal fiber tip sensor for high-temperature measurement. IEEE Sens J 11(11):2643–2648
Park B, Jung IW, Provine J et al (2014) Double-layer silicon photonic crystal fiber-tip temperature sensors. IEEE Photon. Technol. Lett. 26(9):900–903
Qiu C, Hu T, Yu P et al (2012) A temperature sensor based on silicon eye-like microring with sharp asymmetric fano resonance. In: IEEE 9th international conference on group IV photonics (GFP). https://doi.org/10.1109/GROUP4.2012.6324107
Sammak A, Azimi S, Izadi N et al (2007) Deep vertical etching of silicon wafers using a hydrogenation-assisted reactive ion etching. J Microelectromech Syst 16(4):912–918
Schultheis L, Amstutz H, Kaufmann M (1988) Fiber-optic temperature sensing with ultrathin silicon etalons. Opt Lett 13(9):782–784
St-Gelais R, Poulin A, Peter Y (2012) Advances in modeling, design, and fabrication of deep-etched multilayer resonators. J Lightwave Technol 30(12):1900–1908
Tachi S, Tsujimoto K, Okudaira S (1988) Low-temperature reactive ion etching and microwave plasma etching of silicon. Appl Phys Lett 52:616
Tao J, Cai H, Gu Y et al (2015) Demonstration of a photonic-based linear temperature sensor. IEEE Photon Technol Lett 27(7):767–769
Xu H, Hafezi M, Fan J et al (2014) Ultra-sensitive chip-based photonic temperature sensor using ring resonator structures. Opt Express 22(3):3098–3104
Zarei S, Mohajerzadeh S (2017) Exploitation of semi-sequential reactive ion etch processes to fabricate in-plane silicon structures. Micro Nano Lett 13:421–426
Zarei S, Mohajerzadeh S, Shahabadi M (2017) Design and fabrication of a fiber-optic deep-etched silicon Fabry–Perot temperature sensor. In: IEEE international conference on telecommunications and photonics (ICTP). https://doi.org/10.1109/ICTP.2017.8285921
Acknowledgements
The authors would like to thank Mr. Amideddin Mataji-Kojouri from the Photonics Research Lab., School of ECE, University of Tehran, for supplying the TLM Matlab code.
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Zarei, S., Shahabadi, M. & Mohajerzadeh, S. Analysis of a fiber-optic deep-etched silicon Fabry–Perot temperature sensor and modeling its fabrication imperfections. Microsyst Technol 25, 389–397 (2019). https://doi.org/10.1007/s00542-018-3978-z
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DOI: https://doi.org/10.1007/s00542-018-3978-z