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Microsystem Technologies

, Volume 24, Issue 11, pp 4519–4525 | Cite as

The polymerization reaction of cyclic siloxanes on a hard disk under static conditions

  • Tsuyoshi Shimizu
  • Hiroshi Tani
Technical Paper

Abstract

The reaction behavior of the siloxane on carbon materials was investigated. Under the exposure of the low molecular cyclic siloxane such as D4 (octamethyl cyclotetrasiloxane) to both of graphite and a disk coated by a diamond-like carbon (DLC), polar functional groups on carbon materials worked as a catalyst, generating D5 (decamethyl cyclopentasiloxane), D6 (dodecamethyl cyclohexasiloxane) and cyclic siloxanes with a larger molecular weight. By coating of perfluoro polyether (PFPE) lubricants to DLC and graphite, the adsorption amount of D4 was reduced. Furthermore, the PFPE lubricants covered the polar functional group on the surface of carbon materials and deactivated it, so that the generation of D5, D6 and other larger molecular weight cyclic siloxanes were inhibited. It is proposed that these results indicate the behavior of siloxanes on a hard disk under static conditions.

Notes

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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  1. 1.MORESCO CorporationKobeJapan
  2. 2.Kansai UniversityOsakaJapan

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