Advertisement

Microsystem Technologies

, Volume 24, Issue 9, pp 3833–3841 | Cite as

A novel RF MEMS switch on frequency reconfigurable antenna application

  • Yongqing Xu
  • Ying Tian
  • Binzhen Zhang
  • Junping Duan
  • Li Yan
Technical Paper
  • 416 Downloads

Abstract

This paper presents the design, analysis, simulation of a novel radio-frequency micro electromechanical system (RF MEMS) switch on the frequency reconfigurable antenna application. The switch uses coplanar waveguide transmission line for signal transmission, which designed with special mechanical structures, the size of the switch beam is 320 × 120 μm2. The design of RF MEMS switch was simulated using ANSYS. Its simulation voltage is 14 V for 1 µm beam thickness. The electromagnetic performance is optimized and computed by ANSYS EM software. The switch working bandwidth is 40 GHz, the insertion loss is 0.1 dB, return loss of 30 dB and isolation of 26 dB over 30 GHz. In the frequency band, the isolation degree more than 15 dB, and the maximum isolation is 45.3 dB. The switch is mounted on the antenna, and the frequency of the antenna can be reconstructed by using ANSYS EM simulation.

Notes

Acknowledgements

The authors sincerely thank to Science and Technology on Electronic Test and Measurement Laboratory, North University of China for their support with the computer resource. Sponsored by the National Natural Science Foundation of China (51475438) (61401405) (U1637212); National Science Foundation of Shanxi Province (2014011021-4); Shanxi Scholarship Council of China (2014-055); Fund for Shanxi’1311 Project’ Key Subject Construction.

References

  1. Chen C (2013) Applied to K-band reconfigurable antenna’s RF MEMS switch research and design. Dissertation, Beijing University of Posts and TelecommunicationsGoogle Scholar
  2. Deng Z, Guo X, Wei H, Gan J, Wang Y (2016) Design, analysis, and verification of Ka-Band pattern reconfigurable patch antenna using RF MEMS switches. Micromachines.  https://doi.org/10.3390/mi7080144 Google Scholar
  3. Ilkhechi AK, Mirzajani H, Aghdam EN et al (2017) A new electrostatically actuated rotary three-state DC-contact RF MEMS switch for antenna switch applications. Microsyst Technol.  https://doi.org/10.1007/s00542-015-2714-1 Google Scholar
  4. Jha M, Gogna R, Gaba GS, Miglani Rajan (2016) An ultra wideband, novel and reliable RF MEMS switch. Trans Electrical Electron Mater 17(4):183–188CrossRefGoogle Scholar
  5. Khodadady K, Ganji BA (2016) Design and modeling of a novel RF MEMS series switch with low actuation voltage. Microsyst Technol.  https://doi.org/10.1007/s00542-015-2683-4 Google Scholar
  6. Koutsoureli M, Michalas L, Papandreou E, Papaioannou G (2017) Dielectric charging asymmetry in SiN films used in RF MEMS capacitive switches. IEEE Trans Device Mater Reliab 17(1):138–145CrossRefGoogle Scholar
  7. Kruusing A (2000) Analysis and optimization of loaded cantilever beam micro actuators. Smart Mater Struct 9(2):186CrossRefGoogle Scholar
  8. Lakshmi S, Manohar P, Naga Sayanu P (2017) Optimization of structures of DC RF MEMS series switches for low actuation. Microsyst Technol.  https://doi.org/10.1007/s00542-016-3063-4 Google Scholar
  9. Li M, Zhao J, You Z et al (2017) Design and experimental validation of a restoring force enhanced RF MEMS capacitive switch with stiction—recovery electrodes. Microsyst Technol.  https://doi.org/10.1007/s00542-016-3134-6 Google Scholar
  10. Pal J, Zhu Y, Junwei L, Dao DV, Khan F (2015) RF MEMS switches for smart antennas. Microsyst Technol.  https://doi.org/10.1007/s00542-014-2111-1 Google Scholar
  11. Pal J, Zhu Y, Lu J et al (2016) High power and reliable SPST/SP3T RF MEMS switches for wireless applications. IEEE Electron Device Lett 37(9):1219–1222CrossRefGoogle Scholar
  12. Rousstia MW, Reniers ACF, Herben MHAJ (2015) Switched-beam array of dielectric rod antenna with RF-MEMS switch for millimeter-wave applications. Radio Sci.  https://doi.org/10.1002/2014RS005471 Google Scholar
  13. Saha SC, Hanke U, Jensen GU, Sather T (2006) Modeling of spring constant and pull down voltage of non-uniform RF MEMS Cantilever, In: Proceedings of the 2006 IEEE international, behavioral modeling and simulation workshop, pp 56–60Google Scholar
  14. Singh T (2017) Optimisation of cantilever based metal-to-metal contact RF MEMS switches design parameters depending on EM waves propagation for L, S and C-band. Microsyst Technol.  https://doi.org/10.1007/s00542-015-2770-6 Google Scholar
  15. Sudhanshu Shekhar KJ, Vinoy GK, Ananthasuresh (2017) Surface-micromachined capacitive RF switches with low actuation voltage and steady contact. J Microelectromech Syst 26(3):643–652CrossRefGoogle Scholar
  16. Wipf ST, Göritz A, Wietstruck M et al (2016) D-band RF-MEMS SPDT switch in a 0.13 μm SiGe BiCMOS technology. IEEE Microwave Wirel Compon Lett 26(12):1002–1004CrossRefGoogle Scholar
  17. Zhu Y, Han L, Qin M, Huang Q (2014) Novel DC-40 GHz MEMS series-shunt switch for high isolation and high power applications. Sens Actuator A 214:101–110CrossRefGoogle Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  • Yongqing Xu
    • 1
  • Ying Tian
    • 2
  • Binzhen Zhang
    • 1
  • Junping Duan
    • 1
  • Li Yan
    • 2
  1. 1.Science and Technology on Electronic Test and Measurement LaboratoryNorth University of ChinaTaiyuanPeople’s Republic of China
  2. 2.Sichuan Aerospace Liaoyuan Science and Technology Co., LtdChengduPeople’s Republic of China

Personalised recommendations