Microsystem Technologies

, Volume 24, Issue 9, pp 3833–3841 | Cite as

A novel RF MEMS switch on frequency reconfigurable antenna application

  • Yongqing Xu
  • Ying Tian
  • Binzhen Zhang
  • Junping Duan
  • Li Yan
Technical Paper


This paper presents the design, analysis, simulation of a novel radio-frequency micro electromechanical system (RF MEMS) switch on the frequency reconfigurable antenna application. The switch uses coplanar waveguide transmission line for signal transmission, which designed with special mechanical structures, the size of the switch beam is 320 × 120 μm2. The design of RF MEMS switch was simulated using ANSYS. Its simulation voltage is 14 V for 1 µm beam thickness. The electromagnetic performance is optimized and computed by ANSYS EM software. The switch working bandwidth is 40 GHz, the insertion loss is 0.1 dB, return loss of 30 dB and isolation of 26 dB over 30 GHz. In the frequency band, the isolation degree more than 15 dB, and the maximum isolation is 45.3 dB. The switch is mounted on the antenna, and the frequency of the antenna can be reconstructed by using ANSYS EM simulation.



The authors sincerely thank to Science and Technology on Electronic Test and Measurement Laboratory, North University of China for their support with the computer resource. Sponsored by the National Natural Science Foundation of China (51475438) (61401405) (U1637212); National Science Foundation of Shanxi Province (2014011021-4); Shanxi Scholarship Council of China (2014-055); Fund for Shanxi’1311 Project’ Key Subject Construction.


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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  • Yongqing Xu
    • 1
  • Ying Tian
    • 2
  • Binzhen Zhang
    • 1
  • Junping Duan
    • 1
  • Li Yan
    • 2
  1. 1.Science and Technology on Electronic Test and Measurement LaboratoryNorth University of ChinaTaiyuanPeople’s Republic of China
  2. 2.Sichuan Aerospace Liaoyuan Science and Technology Co., LtdChengduPeople’s Republic of China

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