Microsystem Technologies

, Volume 24, Issue 5, pp 2379–2387 | Cite as

Multiport RF MEMS switch for satellite payload applications

  • M. Bala Subramanian
  • C. Joshitha
  • B. S. Sreeja
  • Prita Nair
Technical Paper


Design, fabrication and characterization of a novel RF switch is proposed in this paper. The multiport RF MEMS switch provides a single input multiple output novel topology suitable for satellite payload applications. A single ETA is used to switch the device from one mode to another. When a voltage difference is applied across the electrode pads of ETA, and depending on the configuration, the actuator actuates forward or backward in plane producing either a quad or dual output respectively. The reflection loss and insertion loss are improved effectively. Measurement results show that in `dual mode’ position, the input reflection coefficient (S 11) is less than − 50 dB with the forward transmission coefficient (S 21) better than − 2 dB at 0–15 GHz. At ‘quad mode’, position, the input reflection coefficient (S 11) is less than − 55 dB with the forward transmission coefficient (S 21) better than − 4 dB at 0–15 GHz. The larger than 50 dB over 0–15 GHz isolation realized in both modes of operation ensures dual and quad mode outputs without information loss. The actuation voltage is reduced to 4.5 V. The measured power handling capability can reach up to 35 dBm while the power consumption of the switch is 50 mW. This compact RF MEMS capacitive switch possesses excellent performances in terms of low insertion loss, high isolation, low power and high power handling capability.



The team at SSN would like to acknowledge with thanks the huge effort put in by Ms Veda and her team from NMIT in coordinating the whole SOIMUMPS community chip program. We express our sincere thanks to NPMASS, the coordinators from IISc Bangalore Dr. K.J.Vinoy, Dr. Navakanth Bhat, Dr Rudra Prathap, Dr. G Ananthasuresh and also the whole team at CeNSE for theier support to conduct the device characterization. The authors also acknowledge the co-operation of HCL Technologies Ltd to carry out the S-parameter measurement of the proposed RF MEMS switch.


  1. Aghaei S, Abbaspour-Sani E (2010) A low voltage vertical comb RF MEMS switch. Microsyst Technol 16(6):919–924CrossRefGoogle Scholar
  2. Pustan M et. al (2017) Design, Fabrication and Characterization of RF MEMS Switches with Robust Contact 2017. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMSGoogle Scholar
  3. Bansal D, Kumar A, Sharma A, Kumar P, Rangra KJ (2014) Designof novel compact anti-stiction and low insertion loss RF MEMS switch. Microsyst Technol 20(2):337–340CrossRefGoogle Scholar
  4. Daneshmand M, Mansour RR (2005) Multiport MEMS-Based Waveguide and Coaxial Switches. IEEE Trans Microw Theory Tech 53(11):3531–3537CrossRefGoogle Scholar
  5. Daneshmand M, Mansour RR (2011) RF MEMS Satellite Switch Matrices. In: IEEE Microwave Magazine. p 02–109Google Scholar
  6. Deng P, Wang N, Cai F et al (2017) Microsyst Technol 23:4699. CrossRefGoogle Scholar
  7. Girija Sravani K, Srinivasa Rao K (2017) Microsyst Technol. Google Scholar
  8. He X, Liu B, Lv Z, Li Z (2012) A lateral RF MEMS capacitive switch utilizing parylene as dielectric. Microsyst Technol 18(1):77–85CrossRefGoogle Scholar
  9. Jaiswal A, Dey S, Abegaonkar MP, Koul SK (2017) Surface micromachined RF MEMS SP9T switch for 60 GHz ISM band antenna sectoring applications. In: IEEE 30th Canadian Conference on Electrical and Computer Engineering (CCECE), Windsor, ON, 2017, p 1–4Google Scholar
  10. Kageyama T, Shinozaki K, Zhang L, Lu J, Takaki H, Lee S-S (2017) An ohmic contact type RF-MEMS Switch Having Au-Au/CNTs Contacts. In: Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Los Angeles, USAGoogle Scholar
  11. Kashani Ilkhechi A, Mirzajani H, Najafi Aghdam E et al (2017) Microsyst Technol 23:231. CrossRefGoogle Scholar
  12. Li M, Zhao J, You Z et al (2017) Microsyst Technol 23:3091. CrossRefGoogle Scholar
  13. Liu Y, Bey Y, Liu X (2017) High-power high-isolation RF-MEMS switches with enhanced hot-switching reliability using a shunt protection technique. IEEE Trans Microw Theory Tech 65(9):3188–3199CrossRefGoogle Scholar
  14. Mirzajani H, Aghdam EN, Ghavifekr HB, Jafarpour A (2017) 3-State, high contact and release force RF MEMS switch designed based on MetalMUMPs Process. In: 25th Iranian conference on electrical engineering (ICEE20 17), KN Toosi University of Technology, IranGoogle Scholar
  15. Mirzajani H, Ilkhechi AK, Zolfaghari P, Azadbakht M, Aghdam EN, Ghavifekr HB (2017b) Power efficient, low loss and ultra-high isolation RF MEMS switch dedicated for antenna switch applications. Microelectron J 69:64–72. (ISSN 0026-2692) CrossRefGoogle Scholar
  16. Nordquist CD, Baker MS, Kraus GM, Czaplewski DA, Patrizi GA (2009) Poly-silicon based latching RF MEMS switch. Microwave Wirel Compon Lett IEEE 19(6):380–382CrossRefGoogle Scholar
  17. Pal J, Zhu Y, Lu J, Khan F, Dao D (2015) A Novel three-state contactless RF micromachined switch for wireless applications. IEEE Electron Device Lett 36(12):1363–1365CrossRefGoogle Scholar
  18. Pirmoradi E, Mirzajani H, Ghavifekr BH (2015) Design and simulation of a novel electro-thermally actuated lateral RF MEMS latching switch for low power applications. Microsyst Technol 21(2):465–475CrossRefGoogle Scholar
  19. Que L, Udeshi K, Park J, Gianchandani YB (2004) A bi-stable electro-thermal RF switch for high power applications. In: Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS) IEEE, New York, p 797–800Google Scholar
  20. Rebeiz GM, Patel CD, Han SK, Ko C-H, Kevin MJ (2013) The Search for a Reliable MEMS Switch? In: IEEE Microwave Magazine, p 57–67Google Scholar
  21. Vahabisani N, Daneshmand M (2015) Monolithic millimeter-wave MEMS waveguide switch. IEEE Trans Microw Theory Tech 63(2):340–351CrossRefGoogle Scholar

Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2017

Authors and Affiliations

  • M. Bala Subramanian
    • 1
  • C. Joshitha
    • 1
  • B. S. Sreeja
    • 1
  • Prita Nair
    • 1
  1. 1.Sri Sivasubramaniya Nadar College of EngineeringChennaiIndia

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