Microsystem Technologies

, Volume 24, Issue 4, pp 2025–2034 | Cite as

Design and optimization of DETF resonator based on uncertainty analysis in a micro-accelerometer

Technical Paper


Boundary structure and geometry parameters of the Double-Ended-Tuning Fork (DETF) resonator in a micro-accelerometer are investigated. The theoretical vibration model of a DETF resonator is established and verified by the simulation results obtained by finite element method. Uncertainty analysis incorporating the parametric uncertainty distribution is conducted by establishing the sample-based stochastic model to systematically investigate the influence of different geometry parameters of the DETF resonator on the natural frequency and the sensitivity of DETF resonator. The results reveal the different influences of geometry parameters, which can be used as reference for design and optimization of the DETF resonator of the micro-accelerometer.



This study was supported by the Fundamental Research Funds for the Central Universities under grants number YZ620, Postdoctoral Science Foundation of China under Grants number 2016M591049.


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Copyright information

© Springer-Verlag GmbH Germany 2017

Authors and Affiliations

  1. 1.College of Information Science and TechnologyBeijing University of Chemical TechnologyBeijingChina
  2. 2.School of Instrument Science and Opto-electronics EngineeringBeihang UniversityBeijingChina
  3. 3.North Automatic Control Technology Research InstituteTaiyuanChina

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